SCOPUS 정보 검색 플랫폼

Nanofabrication: Techniques and Principles

Volumn 9783709104248, Issue , 2012, Pages 143-161

Atomic layer deposition for nanotechnology

(2) Foroughi Abari, A a Cadien, K a

a UNIVERSITY OF ALBERTA (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; CHEMICAL VAPOR DEPOSITION; DEPOSITION; INTEGRATED CIRCUITS; NANOTECHNOLOGY; THICK FILMS; THIN FILMS; YARN;

DISPLAY TECHNOLOGIES; INTEGRATED CIRCUIT FABRICATION; NANOMETER-THICK FILMS; NANOTECHNOLOGY APPLICATIONS; PIN HOLES;

VAPOR DEPOSITION;

EID: 84930894669 PISSN: None EISSN: None Source Type: Book
DOI: 10.1007/978-3-7091-0424-8_6 Document Type: Chapter

Times cited : (10)

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