Miniature ultrasonic and tactile sensors for dexterous robot

Transactions on Electrical and Electronic Materials

Volumn 13, Issue 5, 2012, Pages 215-220

  Okuyama, Masanori ^a   Yamashita, Kaoru ^b   Noda, Minoru ^b   Sohgawa, Masayuki ^a   Kanashima, Takeshi ^a   Noma, Haruo ^c  

^a OSAKA UNIVERSITY   (Japan)

^b KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

^c ADVANCED TELECOMMUNICATIONS RESEARCH INSTITUTE INTERNATIONAL   (Japan)

Author keywords

Cantilever; Diaphragm; Grip; MEMS; Normal stress; Object detection; PDMS; Piezoelectric; Piezoresitive; PZT thin film; Shear stress; Tactile sensor; Touch; Ultrasonic sensor

Indexed keywords

DIAPHRAGMS; MEMS; NANOCANTILEVERS; NATURAL FREQUENCIES; PIEZOELECTRICITY; SHEAR STRESS; SILICON; THIN FILMS; ULTRASONIC APPLICATIONS; ULTRASONIC SENSORS; ULTRASONICS;

CANTILEVER; GRIP; NORMAL STRESS; OBJECT DETECTION; PDMS; PIEZOELECTRIC; PIEZORESITIVE; PZT THIN FILM; TACTILE SENSORS; TOUCH;

SENSORS;

EID: 84930476667     PISSN: 12297607     EISSN: 20927592     Source Type: Journal    
DOI: 10.4313/TEEM.2012.13.5.215     Document Type: Article

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