Diaphragm deflection control of piezoelectric ultrasonic microsensors for sensitivity improvement

Sensors and Actuators, A: Physical

Volumn 139, Issue 1-2 SPEC. ISS., 2007, Pages 118-123

  Yamashita, Kaoru ^a   Nishimoto, Hiroki ^a   Okuyama, Masanori ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Diaphragm; Piezoelectric sensor; Residual stress; Sensitivity; Static deflection

Indexed keywords

DIAPHRAGMS; PIEZOELECTRIC DEVICES; RESIDUAL STRESSES; SENSITIVITY ANALYSIS; THIN FILMS; ULTRASONIC SENSORS;

DEFLECTION CONTROL; PIEZOELECTRIC SENSORS; STATIC DEFLECTION;

MICROSENSORS;

EID: 34548179687     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.04.048     Document Type: Article

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