Stability improvement of tactile sensor of normal and shear stresses using Ni-Cr thin film gauge

IEEJ Transactions on Sensors and Micromachines

Volumn 129, Issue 11, 2009, Pages

  Onishi, Hiroyuki ^a   Sohgawa, Masayuki ^a   Tachibana, Hiroto ^a   Huang, Yu Ming ^a   Kanashima, Takeshi ^a   Okuyama, Masanori ^a   Yamashita, Kaoru ^a,b   Noda, Minoru ^a,b   Noma, Haruo ^c  

^a OSAKA UNIVERSITY   (Japan)

^b KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

^c ADVANCED TELECOMMUNICATIONS RESEARCH INSTITUTE INTERNATIONAL   (Japan)

Author keywords

Cantilever; Elastomer; Strain gauge; Tactile sensor

Indexed keywords

HUMAN-FRIENDLY; LOW RESISTANCE; MICRO-CANTILEVERS; NI-CR THIN FILM; PIEZORESISTANCE; STABILITY IMPROVEMENT; STRAIN GAUGE; TACTILE SENSORS; TEMPERATURE COEFFICIENT OF RESISTANCE;

ATOMIC FORCE MICROSCOPY; CHROMIUM; NANOCANTILEVERS; RUBBER; SENSORS; SHEAR STRESS; STRAIN GAGES; STRENGTH OF MATERIALS; THIN FILM DEVICES; THIN FILMS;

VACUUM EVAPORATION;

EID: 71449123669     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.129.411     Document Type: Article

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