Comparison of piezoresistive and capacitive ultrasonic transducers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5391, Issue , 2004, Pages 230-238

  Neumann, John J ^a   Greve, David W ^a   Oppenheim, Irving J ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Capacitive; Diaphragm; MEMS; Piezoresistive; Ultrasonics

Indexed keywords

CAPACITIVE; DIAPHRAGM; MEMS; PIEZORESISTORS;

CAPACITANCE; CMOS INTEGRATED CIRCUITS; ELECTRIC CONDUCTORS; ELECTRODES; MICROELECTROMECHANICAL DEVICES; RESISTORS; ULTRASONICS;

ULTRASONIC TRANSDUCERS;

EID: 10044261202     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.539560     Document Type: Conference Paper

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