Sensitivity change in piezoelectric ultrasonic microsensors caused by a variation of diaphragm structures

Journal of the Korean Physical Society

Volumn 55, Issue 2 PART 1, 2009, Pages 902-907

  Yamashita, Kaoru ^a,b   Noda, Minoru ^a,b   Yoshizaki, Tomoya ^b   Okuyama, Masanori ^b  

^a KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

Diaphragm; Layered structure; Sensitivity; Strain; Ultrasonic sensor

Indexed keywords

EID: 70349326749     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.55.902     Document Type: Article

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