Silicon three-axial tactile sensor

Sensors and Actuators, A: Physical

Volumn 54, Issue 1-3, 1996, Pages 505-510

  Chu, Z ^a   Sarro, P M ^a   Middelhoek, S ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Bulk micromachining; Capacitive principle; Finite element method; Three axial tactile sensors

Indexed keywords

EID: 0000364466     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(95)01190-0     Document Type: Article

References (7)

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