Buckling control of silicon dioxide diaphragms by lateral stress enhancement for sensitivity improvement of piezoelectric ultrasonic microsensors

Sensors and Actuators, A: Physical

Volumn 165, Issue 1, 2011, Pages 54-58

  Yamashita, K ^a,b   Watanabe, T ^b   Yoshizaki, T ^b   Noda, M ^a,b   Okuyama, M ^b  

^a KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

Buckling; Diaphragm; Lateral stress; PZT; Sensitivity; Ultrasonic sensor

Indexed keywords

CONVENTIONAL SENSORS; LATERAL STRESS; LAYERED STRUCTURES; MICROMACHINED SILICON; PB(ZR , TI)O; PZT; PZT LAYER; SENSITIVITY; SENSITIVITY ENHANCEMENTS; SENSITIVITY IMPROVEMENTS; SILICON DIOXIDE; SILICON DIOXIDE FILM; SILICON ON INSULATOR; STATIC DEFLECTIONS;

BUCKLING; LEAD; MICROSENSORS; PIEZOELECTRICITY; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SILICON WAFERS; ULTRASONIC SENSORS; ULTRASONICS; ZIRCONIUM;

DIAPHRAGMS;

EID: 79951772162     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.04.007     Document Type: Conference Paper

References (14)

1. B.T. Khuri-Yakub, C.H. Cheng, F.L. Degertekin, S. Ergun, S. Hansen, X.C. Jin, and O. Oralkan Silicon micromachined ultrasonic transducers Jpn. J. Appl. Phys. 39 2000 2883 2887
2. S. Aoyagi, K. Furukawa, K. Yamashita, T. Tanaka, K. Inoue, and M. Okuyama Developement of capacitive ultrasonic sensor with parylene diaphragm using micromachining technique Jpn. J. Appl. Phys. 46 2007 4595 4601 (Pubitemid 47260478)
3. X. Jin, I. Ladabaum, and B.T. Khuri-Yakub The microfabrication of capacitive ultrasonic transducers IEEE J. Microelectromech. Syst. 7 1998 295 302 (Pubitemid 128611226)
4. J.J. Neumann, D.W. Greve, and I.J. Oppenheim Comparison of piezoresistive and capacitive ultrasonic transducers SPIE Smart Structure Conference 2004, San Diego, USA, March 14-18 2004 230 238
5. Y. Hashimoto, A. Nakai, H. Kawano, K. Matsumoto, and I. Shimoyama Thin and small ultrasonic distance sensor with thermoacoustic transmitter and piezoresistive cantilever receiver Asia Pacific Conference of Transducers and Micro-Nano Technologies 2008, vol. 2, Tainan, Taiwan, June 22-25 2008 2 3
6. 3 thin film ultrasonic microsensor fabricated on Si wafer Jpn. J. Appl. Phys. Suppl. 23 1984 133 135
7. J.T. Bernstein, S.L. Finberg, K. Houston, L.C. Niles, H.D. Chen, L.E. Corss, K.K. Lee, and K. Udayakumar Micromachined high frequency ferroelectric sonar transducers IEEE Trans. Ultrason. Ferro. Freq. Cont. 44 1997 960 969 (Pubitemid 127771285)
8. P. Muralt, D. Schmitt, N. Ledermann, J. Baborowski, P. K. Weber, W. Steichen, S. Petitgrand, A. Bosseboeuf, N. Setter, P. Gaucher, Study of PZT coated membrane structures for micromachined ultrasonic transducers 2001, IEEE Ultrason. Symp. Proc., New York, October 7-10 (2001) pp. 907-911 (Pubitemid 34277418)
9. Z.H. Wang, J.M. Miao, T. Xu, G. Barbastathis, and M. Triantaffylou Micromachined piezoelectric microphone with high signal to noise ratio Tech. Dig. Transducers 2009, Denver, USA, June 21-25 2009 1553 1556
10. K. Yamashita, H. Katata, M. Okuyama, H. Miyoshi, G. Kato, S. Aoyagi, and Y. Suzuki Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms Sens. Actuators A 97-98 2002 302 307 (Pubitemid 34758738)
11. K. Yamashita, H. Nishimoto, and M. Okuyama Diaphragm deflection control of piezoelectric ultrasonic microsensors for sensitivity improvement Sens. Actuators A 139 2007 118 123 (Pubitemid 47314220)
12. K. Yamashita, T. Yoshizaki, M. Noda, and M. Okuyama Sensitivity change in piezoelectric ultrasonic microsensors caused by variation of diaphragm structures J. Korean Phys. Soc. 55 2009 902 907
13. S. Aoyagi, Y. Kamiya, and S. Okabe Development of powerful airborne ultrasonic transmitter for robot metrology Jpn. J. Appl. Phys. 31-1 Suppl. 1991 263 265
14. K. Yamashita, and M. Okuyama Sensitivity improvement of diaphragm type ultrasonic sensors by complementary piezoelectric polarization Sens. Actuators A 127 2006 119 122 (Pubitemid 43253672)