Thin-film piezoelectric bimorph actuators with increased thickness using double Pb[Zr,Ti]O3 layers

Journal of Micromechanics and Microengineering

Volumn 25, Issue 5, 2015, Pages

  Inoue, Jun Ichi ^a   Kanda, Kensuke ^a   Fujita, Takayuki ^a   Maenaka, Kazusuke ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

MEMS; PZT; PZT PZT bimorph; sputtering; thick film

Indexed keywords

ACTUATORS; DEPOSITION; ELECTRIC FIELDS; ELECTROMECHANICAL DEVICES; FABRICATION; LEAD; MAGNETRON SPUTTERING; MEMS; NANOCANTILEVERS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; SPUTTERING; THICK FILMS; THIN FILMS; ZIRCONIUM;

COERCIVE ELECTRIC FIELD; FERROELECTRIC CHARACTERISTICS; HIGH VOLTAGE APPLICATIONS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); PIEZOELECTRIC COEFFICIENT; PZT; RADIO FREQUENCY MAGNETRON SPUTTERING; THIN FILM PIEZOELECTRIC;

FILM THICKNESS;

EID: 84927926682     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/25/5/055001     Document Type: Article

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