A slim type microvalve driven by PZT films

Sensors and Actuators, A: Physical

Volumn 121, Issue 1, 2005, Pages 162-171

  Kim, Hyonse ^a   In, Chihyun ^b   Yoon, Gilho ^a   Kim, Jongwon ^a  

^a Seoul National University   (South Korea)

^b Daewoo Electronics Co   (South Korea)

Author keywords

Micro cantilever; Micro fluidic system; Microvalve; PZT film

Indexed keywords

ACTUATORS; ARRAYS; ELECTRIC POTENTIAL; FERROELECTRICITY; FINITE ELEMENT METHOD; MAGNETIC FIELDS; SEMICONDUCTING LEAD COMPOUNDS; SHAPE MEMORY EFFECT; SILICA; SILICON ON INSULATOR TECHNOLOGY; VALVES (MECHANICAL);

MICRO FLUIDIC SYSTEMS; MICRO-CANTILEVERS; MICROVALVES; PZT FILMS;

THIN FILMS;

EID: 21744457996     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.12.005     Document Type: Article

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