Vibration Energy Harvesting with PZT Micro Device

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 1191-1194

  Muralt, P ^a   Marzencki, M ^b   Belgacem, B ^a   Calame, F ^a   Basrour, S ^b  

^a EPFL   (Switzerland)

^b TIMA LABORATORY   (France)

Author keywords

Micropower generator; piezoelectricity; PZT thin film; vibration harvesting

Indexed keywords

ACTIVE AREA; ACTIVE PARTS; COUPLING CONSTANTS; HIGH IMPEDANCE; INERTIAL OSCILLATION; INTER-DIGITATED ELECTRODES; LOAD IMPEDANCE; MICRO DEVICES; MICROPOWER GENERATOR; OUTPUT POWER; PROOF MASS; PZT; PZT THIN FILM; RESONANCE FREQUENCIES; VIBRATION ENERGIES; VIBRATION ENERGY HARVESTING;

ATOMIC FORCE MICROSCOPY; CRYSTALLOGRAPHY; HARVESTING; NANOCANTILEVERS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; POWER GENERATION; PYROELECTRICITY; RESONANCE; THIN FILM DEVICES; THIN FILMS;

SEMICONDUCTING LEAD COMPOUNDS;

EID: 71549166022     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.297     Document Type: Conference Paper

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