SOI rate gyro sensor for automotive control

Sensors and Actuators, A: Physical

Volumn 132, Issue 1 SPEC. ISS., 2006, Pages 42-46

  Nonomura, Y ^a   Fujiyoshi, M ^a   Omura, Y ^a   Fujitsuka, N ^a   Mizuno, K ^a   Tsukada, K ^a  

^a Rd Management Section   (Japan)

Author keywords

Rate gyro sensor; SOI; Vibration

Indexed keywords

FEATURE EXTRACTION; FINITE ELEMENT METHOD; MICROMACHINING; SENSORS; VIBRATION CONTROL;

AUTOMOTIVE CONTROL; OPEN BEAM STRUCTURE (OBS); RATE GYRO SENSOR;

SILICON ON INSULATOR TECHNOLOGY;

EID: 33751108572     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.06.002     Document Type: Article

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