A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure operating at atmospheric pressure

Journal of Micromechanics and Microengineering

Volumn 20, Issue 1, 2010, Pages

  Che, Lufeng ^a   Xiong, Bin ^a   Li, Yufang ^a   Wang, Yuelin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; ATMOSPHERIC STRUCTURE; ELECTROSTATICS; GLASS; GYROSCOPES; NATURAL FREQUENCIES; POWER INDUCTORS; REACTIVE ION ETCHING; SUBSTRATES; TUNING;

CAPACITIVE SENSING; DEEP REACTIVE ION ETCHING; ELECTROSTATIC DRIVING; GLASS SUBSTRATES; HIGH QUALITY FACTORS; MICRO-MACHINED GYROSCOPE; SENSING ELECTRODE; SLIDE FILM DAMPING;

GLASS BONDING;

EID: 84863736196     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/1/015025     Document Type: Article

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