Compatibility of material processing and fabrication of sol-gel derived PZT based devices

Ferroelectrics

Volumn 383, Issue 1 PART 4, 2009, Pages 127-132

  Yu, Jyh Cheng ^a   Wu, Jun Xiang ^a   Yeh, Tsung Her ^b   Chou, Chen Chia ^b  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Flexural plate wave; Poling; PZT annealing; PZT device; Sol gel PZT

Indexed keywords

ACOUSTIC SENSORS; ANNEALING TEMPERATURES; CO2-LASER; FABRICATION PROCEDURE; FILM PROPERTIES; FLEXURAL PLATE WAVES; FURNACE HEATING; HIGH-TEMPERATURE ANNEALING; LEAD ZIRCONATE TITANATE THIN FILMS; MATERIAL PROCESSING; MATERIAL STRUCTURE; METAL ELECTRODES; MICRO ACCELEROMETERS; MICRO DEVICES; PARAMETER STUDIES; PZT; PZT DEVICE; PZT THIN FILM; STRUCTURE LAYERS;

ANNEALING; FABRICATION; GELS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PLATES (STRUCTURAL COMPONENTS); SOL-GEL PROCESS; SOL-GELS; SOLS; THIN FILMS;

SEMICONDUCTING LEAD COMPOUNDS;

EID: 77949295622     PISSN: 00150193     EISSN: 15635112     Source Type: Journal    
DOI: 10.1080/00150190902888681     Document Type: Conference Paper

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