Low-temperature roll-to-roll atmospheric atomic layer deposition of Al2O3 thin films

Langmuir

Volumn 30, Issue 47, 2014, Pages 14195-14203

  Ali, Kamran ^a   Choi, Kyung Hyun ^a  

^a Jeju National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ATMOSPHERIC CHEMISTRY; ATMOSPHERIC PRESSURE; ATOMIC LAYER DEPOSITION; BINDING ENERGY; DEPOSITION; FABRICATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; OPTICAL PROPERTIES; PLASTIC BOTTLES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL COMPOSITIONS; DEPOSITION TEMPERATURES; FILM CHARACTERISTICS; INSULATING PROPERTIES; MORPHOLOGICAL FEATURES; OPTICAL CHARACTERISTICS; THIN FILMS DEPOSITION; WORKING PRESSURES;

ATMOSPHERIC TEMPERATURE;

EID: 84914112840     PISSN: 07437463     EISSN: 15205827     Source Type: Journal    
DOI: 10.1021/la503406v     Document Type: Article

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