High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 30, Issue 2, 2012, Pages

  Dickey, Eric ^a   Barrow, William A ^a  

^a Lotus Applied Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARRIER FILMS; HIGH QUALITY; HIGH RATE; LOW COSTS; MOISTURE BARRIERS; POLYMER SUBSTRATE; ROLL TO ROLL; SCALE-UP; SCALE-UP EFFORTS; SINGLE LAYER; SINGLE PASS; TIO; WATER VAPOR TRANSMISSION RATE; WEB SPEED;

ATOMIC LAYER DEPOSITION; MOISTURE; POLYETHYLENE TEREPHTHALATES; SERPENTINE; SUBSTRATES; TITANIUM DIOXIDE;

POLYMER FILMS;

EID: 84858028341     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3678486     Document Type: Article

References (12)

1. S. M. George, Chem. Rev. 110, 111 (2010). 10.1021/cr900056b
2. International Technology Roadmap for Semiconductors, 2009 Editon, see: www.itrs.net/Links/2009ITRS/2009Chapters-2009Tables/2009-FEP.pdf.
3. P. Poodt, A. Lankhorst, F. Roozeboom, K. Spee, D. Maas, and A. Vermeer, Adv. Mater., 22, 2364 (2010). 10.1002/adma.201000766
4. rd Annual Technical Conference Proceedings of the Society of Vacuum Coaters, Orlando, FL (Society of Vacuum Coaters, Albuquerque, NM, 2010), pp. 138-141.
5. nd Annual Technical Conference Proceedings of the Society of Vacuum Coaters, Santa Clara, CA, (Society of Vacuum Coaters, Albuquerque, NM, 2009), pp. 720-726.
6. A. P. Ghosh, L. J. Gerenser, C. M. Jarman, and J. E. Fornalik, Appl. Phys. Lett. 86, 223503 (2005). 10.1063/1.1929867 (Pubitemid 40861631)
7. M. D. Groner, S. M. George, R. S. McLean, and P. F. Carcia, Appl. Phys. Lett. 88, 051907 (2006). 10.1063/1.2168489 (Pubitemid 43190860)
8. P. F. Carcia, R. S. McLean, M. H. Reilly, M. D. Groner, and S. M. George, Appl. Phys. Lett. 89, 031915 (2006). 10.1063/1.2221912 (Pubitemid 44107043)
9. P. F. Carcia, R. S. McLean, M. D. Groner, A. A. Dameron, and S. M. George, J. Appl. Phys. 106, 023533 (2009). 10.1063/1.3159639
10. P. Konttinen and P. D. Lund, Sol. Energy Mater. Sol. Cells 82, 361 (2004). 10.1016/j.solmat.2003.12.006
11. rd Annual Technical Conference Proceedings of the Society of Vacuum Coaters, Orlando, FL, (Society of Vacuum Coaters, Albuquerque, NM, 2010), pp. 558-564.
12. th Annual Technical Conference Proceedings of the Society of Vacuum Coaters, Chicago, IL, (Society of Vacuum Coaters, Albuquerque, NM, 2011), pp. 70-75.