Barrier properties of plastic films coated with an Al2O 3 layer by roll-to-toll atomic layer deposition

Thin Solid Films

Volumn 550, Issue , 2014, Pages 164-169

  Hirvikorpi, Terhi ^a   Laine, Risto ^a   Vähä Nissi, Mika ^b   Kilpi, Väinö ^a   Salo, Erkki ^b   Li, Wei Min ^a   Lindfors, Sven ^a   Vartiainen, Jari ^b   Kenttä, Eija ^b   Nikkola, Juha ^b   Harlin, Ali ^b   Kostamo, Juhana ^a  

^a Picosun Oy   (Finland)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Aluminum oxide; Atomic layer deposition; Barrier; Flexible material; Polymer; Roll to roll

Indexed keywords

ALUMINA; ALUMINUM COATINGS; ALUMINUM OXIDE; ATOMS; BATCH DATA PROCESSING; FLEXIBLE DISPLAYS; ORGANIC LIGHT EMITTING DIODES (OLED); PACKAGING MATERIALS; PLASTIC COATINGS; POLYMERS; TEMPERATURE; TEXTILES; THIN FILM SOLAR CELLS; THIN FILMS;

BARRIER; BARRIER PROPERTIES; FLEXIBLE MATERIALS; HIGH ENERGY DENSITIES; PRINTED ELECTRONICS; ROLL TO ROLL; THIN FILM BATTERY; THIN-FILM PHOTOVOLTAIC DEVICES;

ATOMIC LAYER DEPOSITION;

EID: 84890314166     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2013.10.148     Document Type: Article

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