High-performance ZnO nanowire transistors with aluminum top-gate electrodes and naturally formed hybrid self-assembled monolayer/AlOx gate dielectric

ACS Nano

Volumn 8, Issue 7, 2014, Pages 6840-6848

  Kälblein, Daniel ^a   Ryu, Hyeyeon ^a   Ante, Frederik ^a   Fenk, Bernhard ^a   Hahn, Kersten ^b   Kern, Klaus ^a,c   Klauk, Hagen ^a  

^a MAX PLANCK INSTITUT FÜR FESTKÖRPERFORSCHUNG   (Germany)

^b MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

^c EPFL   (Switzerland)

Author keywords

hybrid dielectric; nanowire transistors; organic light emitting diodes; zinc oxide

Indexed keywords

ALUMINUM; GATE DIELECTRICS; NANOWIRES; ORGANIC LIGHT EMITTING DIODES (OLED); OXIDES; REFRACTORY METAL COMPOUNDS; SELF ASSEMBLED MONOLAYERS; TRANSISTORS; ZINC OXIDE;

ALUMINUM OXIDES; GATE-SOURCE VOLTAGE; HYBRID DIELECTRICS; LOAD RESISTORS; LOW TEMPERATURES; NANOWIRE TRANSISTORS; ON STATE CURRENT; SURFACE WETTING;

ALUMINUM COATINGS;

EID: 84904732986     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn501484e     Document Type: Article

References (31)

1. McAlpine, M. C.; Friedman, R. S.; Jin, S.; Lin, K. H.; Wang, W. U.; Lieber, C. M. High-Performance Nanowire Electronics and Photonics on Glass and Plastic Substrates Nano Lett. 2003, 3, 1531-1535
2. Zhang, W. F.; He, Z. B.; Yuan, G. D.; Jie, J. S.; Luo, L. B.; Zhang, X. J.; Chen, Z. H.; Lee, C. S.; Zhang, W. J.; Lee, S. T. High-Performance, Fully Transparent, and Flexible Zinc-Doped Indium Oxide Nanowire Transistors Appl. Phys. Lett. 2009, 94, 123103
3. Kwon, S. S.; Hong, W. K.; Jo, G.; Maeng, J.; Kim, T. W.; Song, S.; Lee, T. Piezoelectric Effect on the Electronic Transport Characteristics of ZnO Nanowire Field-Effect Transistors on Bent Flexible Substrates Adv. Mater. 2008, 20, 4557-4562
4. Kang, J.; Keem, K.; Jeong, D. Y.; Kim, S. Electrical Characteristics of ZnO Nanowire-Based Field-Effect Transistors on Flexible Plastic Substrates Jpn. J. Appl. Phys. 2007, 46, 6227-6229
5. McAlpine, M. C.; Ahmad, H.; Wang, D.; Heath, J. R. Highly Ordered Nanowire Arrays on Plastic Substrates for Ultrasensitive Flexible Chemical Sensors Nat. Mater. 2007, 6, 379-384
6. Duan, X.; Niu, C.; Sahi, V.; Chen, J.; Wallace Parce, J.; Empedocles, S.; Goldman, J. L. High-Performance Thin-Film Transistors Using Semiconductor Nanowires and Nanoribbons Nature 2003, 425, 274-278
7. Fan, Z.; Ho, J. C.; Jacobson, Z. A.; Yerushalmi, R.; Alley, R. L.; Razavi, H.; Javey, A. Wafer-Scale Assembly of Highly Ordered Semiconductor Nanowire Arrays by Contact Printing Nano Lett. 2008, 8, 20-25
8. Liu, X. M.; Long, Y. Z.; Liao, L.; Duan, X.; Fan, Z. Large-Scale Integration of Semiconductor Nanowires for High-Performance Flexible Electronics ACS Nano 2012, 6, 1888-1900
9. Ju, S.; Li, J.; Liu, J.; Chen, P.; Ha, Y.; Ishikawa, F.; Chang, H.; Zhou, C.; Facchetti, A.; Janes, D. et al. Transparent Active Matrix Organic Light-Emitting Diode Displays Driven by Nanowire Transistor Circuitry Nano Lett. 2008, 8, 997-1004
10. Zhang, W.; Jie, J.; He, Z.; Tao, S.; Fan, X.; Zhou, Y.; Yuan, G.; Luo, L.; Zhang, W.; Lee, C. S. et al. Single Zinc-Doped Indium Oxide Nanowire as Driving Transistor for Organic Light-Emitting Diode Appl. Phys. Lett. 2008, 92, 153312
11. Chen, P. C.; Shen, G.; Chen, H.; Ha, Y. G.; Wu, C.; Sukcharoenchoke, S.; Fu, Y.; Liu, J.; Facchetti, A.; Marks, T. J. et al. High-Performance Single-Crystalline Arsenic-Doped Indium Oxide Nanowires for Transparent Thin-Film Transistors and Active Matrix Organic Light-Emitting Diode Displays ACS Nano 2009, 3, 3383-3390
12. Keem, K.; Jeong, D.; Kim, S.; Lee, M.; Yeo, I.; Chung, U.; Moon, J. Fabrication and Device Characterization of Omega-Shaped-Gate ZnO Nanowire Field-Effect Transistors Nano Lett. 2006, 6, 1454-1458
13. Wu, P.; Ye, Y.; Sun, T.; Peng, R.; Wen, X.; Xu, W.; Liu, C.; Dai, L. Ultrahigh-Performance Inverters Based on CdS Nanobelts ACS Nano 2009, 3, 3138-3142
14. Kessels, W. M. M.; Putkonen, M. Advanced Process Technologies: Plasma, Direct-Write, Atmospheric Pressure, and Roll-to-Roll ALD MRS Bull. 2011, 36, 907-913
15. Lee, Y. T.; Kim, J. K.; Ha, R.; Choi, H. J.; Im, S. ZnO Nanowire Transistor Inverter Using Top-Gate Electrodes with Different Work Functions Appl. Phys. Lett. 2011, 99, 153507
16. Lee, Y. T.; Raza, S. R. A.; Jeon, P. J.; Ha, R.; Choi, H.-J.; Im, S. Long Single ZnO Nanowire for Logic and Memory Circuits: NOT, NAND, NOR Gate, and SRAM Nanoscale 2013, 5, 4181-4185
17. Kälblein, D.; Weitz, R. T.; Böttcher, H. J.; Ante, F.; Zschieschang, U.; Kern, K.; Klauk, H. Top-Gate ZnO Nanowire Transistors and Integrated Circuits with Ultrathin Self-Assembled Monolayer Gate Dielectric Nano Lett. 2011, 11, 5309-5315
18. Lu, C.; Qi, L.; Yang, J.; Tang, L.; Zhang, D.; Ma, J. Hydrothermal Growth of Large-Scale Micropatterned Arrays of Ultralong ZnO Nanowires and Nanobelts on Zinc Substrate Chem. Commun. 2006, 3551-3553
19. Lee, J. M.; Kim, K. K.; Park, S. J.; Choi, W. K. Low-Resistance and Nonalloyed Ohmic Contacts to Plasma Treated ZnO Appl. Phys. Lett. 2001, 78, 3842-3844
20. Ra, H. W.; Choi, K. S.; Ok, C. W.; Jo, S. Y.; Bai, K. H.; Im, Y. H. Ion Bombardment Effects on ZnO Nanowires during Plasma Treatment Appl. Phys. Lett. 2008, 93, 033112
21. Walzer, K.; Maennig, B.; Pfeiffer, M.; Leo, K. Highly Efficient Organic Devices Based on Electrically Doped Transport Layers Chem. Rev. 2007, 107, 1233-1271
22. Brillson, L. J.; Lu, Y. ZnO Schottky Barriers and Ohmic Contacts J. Appl. Phys. 2011, 109, 121301
23. Özgür, Ü.; Alivov, Y. I.; Liu, C.; Teke, A.; Reshchikov, M. A.; Dogan, S.; Avrutin, V.; Cho, S. J.; Morkoçd, H. A Comprehensive Review of ZnO Materials and Devices J. Appl. Phys. 2005, 98, 041301
24. Li, S. L.; Miyazaki, H.; Kumatani, A.; Kanda, A.; Tsukagoshi, K. Low Operating Bias and Matched Input-Output Characteristics in Graphene Logic Inverters Nano Lett. 2010, 10, 2586-2600
25. Klauk, H.; Zschieschang, U.; Pflaum, J.; Halik, M. Ultralow-Power Organic Complementary Circuits Nature 2007, 445, 745-748
26. Bayraktaroglu, B.; Leedy, K.; Neidhard, R. Microwave ZnO Thin-Film Transistors IEEE Electron Device Lett. 2008, 29, 1024-1026
27. Mourey, D. A.; Zhao, D. A.; Sun, J.; Jackson, T. N. Fast PEALD ZnO Thin-Film Transistor Circuits IEEE Trans. Electron Devices 2010, 57, 530-534
28. 2/Vs Adv. Mater. 2010, 22, 4764-4769
29. Faber, H.; Burkhardt, M.; Jedaa, A.; Kälblein, D.; Klauk, H.; Halik, M. Low-Temperature Solution-Processed Memory Transistors Based on Zinc Oxide Nanoparticles Adv. Mater. 2009, 21, 3099-3104
30. Ante, F.; Kälblein, D.; Zaki, T.; Zschieschang, U.; Takimiya, K.; Ikeda, M.; Sekitani, T.; Someya, T.; Burghartz, J. N.; Kern, K. et al. Contact Resistance and Megahertz Operation of Aggressively Scaled Organic Transistors Small 2012, 8, 73-79
31. Ryu, H.; Kälblein, D.; Schmidt, O. G.; Klauk, H. Unipolar Sequential Circuits Based on Individual-Carbon-Nanotube Transistors and Thin-Film Carbon Resistors ACS Nano 2011, 5, 7525-7531