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Advanced Materials

Volumn 26, Issue 23, 2014, Pages 3962-3967

Ultra-thin 3D nano-devices from atomic layer deposition on polyimide

(6) Eigenfeld, Nathan T a Gray, Jason M a Brown, Joseph J a Skidmore, George D c George, Steven M b Bright, Victor M a

a UCB 450 (United States)

b UNIVERSITY OF COLORADO (United States)

c Network and Imaging Systems DRS ITS Texas Site (United States)

Author keywords

atomic layer deposition; microbolometer; nanofabrication; NEMS; polymers

Indexed keywords

DEPOSITION; NANOTECHNOLOGY; NEMS; POLYIMIDES; POLYMERS;

3-DIMENSIONAL; INORGANIC NANOMATERIALS; MICROBOLOMETER; NANO-DEVICES; NANOFABRICATION PROCESS; POLYIMIDE SUBSTRATE; SUSPENDED STRUCTURE; ULTRA-THIN;

ATOMIC LAYER DEPOSITION;

EID: 84902361351 PISSN: 09359648 EISSN: 15214095 Source Type: Journal
DOI: 10.1002/adma.201400410 Document Type: Article

Times cited : (24)

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