Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Volumn , Issue , 2013, Pages 1507-1510

  Purkl, Fabian ^a,b   English, Timothy S ^c   Yama, Gary ^b   Provine, John ^c   Samarao, Ashwin K ^b   Feyh, Ando ^b   Kim, Bongsang ^b   O'Brien, Gary ^b   Ambacher, Oliver ^a   Howe, Roger T ^c   Kenny, Thomas W ^c  

^a UNIVERSITY OF FREIBURG   (Germany)

^b ROBERT BOSCH GMBH   (Germany)

^c STANFORD UNIVERSITY   (United States)

Author keywords

Atomic Layer Deposition; Metal based bolometer; Platinum thin film; Uncooled infrared detector

Indexed keywords

ABSORBER DESIGN; FABRICATION AND CHARACTERIZATIONS; PLASMA-ENHANCED ATOMIC LAYER DEPOSITION; PLATINUM THIN FILM; RESPONSIVITY; SERPENTINE GEOMETRIES; UNCOOLED INFRARED DETECTORS;

ACTUATORS; ATOMIC LAYER DEPOSITION; BOLOMETERS; DEPOSITION; MICROSYSTEMS; PLATINUM; SERPENTINE; SOLID-STATE SENSORS;

INFRARED DETECTORS;

EID: 84891715354     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/Transducers.2013.6627067     Document Type: Conference Paper

References (8)

1. F. Purkl, T. English, G. Yama, J. Provine, A. K. Samarao,A. Feyh, G. O'Brien, O. Ambacher, R. T. Howe,and T. W. Kenny, "Sub-10 nanometer uncooled platinumbolometers via plasma enhanced atomic layerdeposition," in Micro Electro Mechanical Systems(MEMS), 2013 IEEE 26th International Conferenceon, 2013, pp. 185-188.
2. D. D. Skatrud and P. W. Kruse, Uncooled InfraredImaging Arrays and Systems, ser. Semiconductors andSemimetals, R. K. Willardson and E. R. Weber, Eds.Academic Press, 1997, vol. 47.
3. L. Baker, A. S. Cavanagh, D. Seghete, S. M. George,A. J. M. Mackus, W. M. M. Kessels, Z. Y. Liu,and F. T. Wagner, "Nucleation and growth of Ptatomic layer deposition on Al2O3 substrates using(methylcyclopentadienyl)-trimethyl platinum and O2plasma," Journal of Applied Physics, vol. 109, no. 8,p. 084333, 2011.
4. S. Yoneoka, M. Liger, G. Yama, R. Schuster, F. Purkl,J. Provine, F. B. Prinz, R. T. Howe, and T. W.Kenny, "ALD-metal uncooled bolometer," in MicroElectro Mechanical Systems (MEMS), 2011 IEEE 24thInternational Conference on, 2011, pp. 676-679.
5. S. Yoneoka, J. Lee, M. Liger, G. Yama, T. Kodama,M. Gunji, J. Provine, R. T. Howe, K. E. Goodson,and T. W. Kenny, "Electrical and thermal conductionin atomic layer deposition nanobridges down to 7 nmthickness," Nano Letters, vol. 12, no. 2, pp. 683-686,2012.
6. M. Born and E. Wolf, Principles of Optics: ElectromagneticTheory of Propagation, Interference andDiffraction of Light, 7th ed. Cambridge UniversityPress, Oct. 1999.
7. F. Niklaus, A. Decharat, C. Jansson, and G. Stemme,"Performance model for uncooled infrared bolometerarrays and performance predictions of bolometers operatingat atmospheric pressure," Infrared Physics &Technology, vol. 51, no. 3, pp. 168-177, 2008.
8. D. M. Fleetwood, J. T. Masden, and N. Giordano, "1/fnoise in platinum films and ultrathin platinum wires:Evidence for a common, bulk origin," Phys. Rev. Lett.,vol. 50, no. 6, pp. 450-453, Feb 1983.