Antibacterial and barrier properties of oriented polymer films with ZnO thin films applied with atomic layer deposition at low temperatures

Thin Solid Films

Volumn 562, Issue , 2014, Pages 331-337

  Vähä Nissi, Mika ^a   Pitkänen, Marja ^a   Salo, Erkki ^a   Kenttä, Eija ^a   Tanskanen, Anne ^b   Sajavaara, Timo ^c   Putkonen, Matti ^a   Sievänen, Jenni ^a   Sneck, Asko ^a   Rättö, Marjaana ^a   Karppinen, Maarit ^b   Harlin, Ali ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b AALTO UNIVERSITY   (Finland)

^c UNIVERSITY OF JYVÄSKYLÄ   (Finland)

Author keywords

Aluminum oxide; Antibacterial; Atomic layer deposition; Barrier; Growth; Zinc oxide

Indexed keywords

DEPOSITION; GROWTH (MATERIALS); METALLIC FILMS; OPTICAL FILMS; OXIDES; OZONE; OZONE LAYER; PACKAGING MATERIALS; PLASTIC FILMS; POLYMER FILMS; SEMICONDUCTING FILMS; SILICON WAFERS; THIN FILMS; ZINC OXIDE;

ALUMINUM OXIDES; ANTI-BACTERIAL ACTIVITY; ANTI-BACTERIAL AGENTS; ANTI-MICROBIAL PROPERTIES; ANTIBACTERIAL; BARRIER; CHEMICAL COMPOSITIONS; ZINC OXIDE THIN FILMS;

ATOMIC LAYER DEPOSITION;

EID: 84901751831     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2014.03.068     Document Type: Article

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