Growth of thin Al 2O 3 films on biaxially oriented polymer films by atomic layer deposition

Thin Solid Films

Volumn 522, Issue , 2012, Pages 50-57

  Vähä Nissi, Mika ^a   Kauppi, Emilia ^a   Sahagian, Khoren ^b   Johansson, Leena Sisko ^c   Peresin, Maria Soledad ^a   Sievänen, Jenni ^a   Harlin, Ali ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b Anasys Instruments   (United States)

^c AALTO UNIVERSITY   (Finland)

Author keywords

Aluminum oxide; Atomic force microscopy; Atomic layer deposition; Characterization; Growth; Thin film; Transition temperature microscopy; X ray photoelectron spectroscopy

Indexed keywords

ALUMINUM OXIDES; ATOMIC LAYER; BI-AXIALLY ORIENTED POLYPROPYLENES; CHEMICAL INTERACTIONS; FILM SURFACES; NEAR-SURFACE; ORIENTED POLYMERS; POLY LACTIC ACID; POLYMER SURFACES; SOFTENING TEMPERATURE; SUBSTRATE POLYMERS; THERMOMECHANICAL PROPERTIES; TRIMETHYL ALUMINUMS;

ALUMINUM; ATOMIC FORCE MICROSCOPY; ATOMIC LAYER DEPOSITION; CHARACTERIZATION; FILM GROWTH; GROWTH (MATERIALS); MECHANICAL PROPERTIES; PHOTOELECTRONS; POLYMERS; POLYPROPYLENES; SUBSTRATES; THERMOPLASTICS; THIN FILMS; VAPOR DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

POLYMER FILMS;

EID: 84868517601     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2012.09.043     Document Type: Conference Paper

References (32)

1. C.A. Wilson, R.K. Grubbs, and S.M. George Chem. Mater. 17 2005 5625
2. K. Grigoras, S. Franssila, and V.M. Airaksinen Thin Solid Films 516 2008 5551
3. M.D. Groner, S.M. George, R.S. Mclean, and P.F. Garcia Appl. Phys. Lett. 88 2006 5625
4. T. Hirvikorpi, M. Vähä-Nissi, T. Mustonen, E. Iiskola, and M. Karppinen Thin Solid Films 518 2010 2654
5. J.D. Ferguson, A.W. Weimer, and S.M. George Chem. Mater. 16 2004 5602
6. J.C. Spagnola, B. Gong, S.A. Arvidson, J.S. Jur, S.A. Khan, and G.N. Parsons J. Mater. Chem. 20 2010 4213
7. M.D. Groner, F.H. Fabreguette, J.W. Elam, and S.M. George Chem. Mater. 16 2004 639
8. P.F. Carcia, R.S. McLean, M.H. Reilly, M.D. Groner, and S.M. George Appl. Phys. Lett. 89 2006 031915
9. E. Langereis, M. Creatore, S.B.S. Heil, M.C.M. van de Sanden, and W.M.M. Kessels Appl. Phys. Lett. 89 2006 081915
10. A.A. Dameron, S.D. Davidson, B.B. Burton, P.F. Carcia, R.S. McLean, and S.M. George J. Phys. Chem. C 112 2008 4573
11. T. Hirvikorpi, M. Vähä-Nissi, A. Harlin, and M. Karppinen Thin Solid Films 518 2010 5463
12. T. Hirvikorpi, M. Vähä-Nissi, J. Nikkola, A. Harlin, and M. Karppinen Surf. Coat. Technol. 205 2011 5088
13. T. Hirvikorpi, M. Vähä-Nissi, A. Harlin, J. Marles, V. Miikkulainen, and M. Karppinen Appl. Surf. Sci. 257 2010 736
14. T.O. Kääriäinen, P. Maydannik, D.C. Cameron, K. Lahtinen, P. Johansson, and J. Kuusipalo Thin Solid Films 519 2011 3146
15. 3 Barrier Coatings Grown on Bio-based Packaging Materials by Atomic Layer Deposition VTT 770 2011 VTT Publications
16. M. Vähä-Nissi, T. Hirvikorpi, J. Sievänen, K. Matilainen, E. Salo, and A. Harlin Solid State Phenom. 185 2012 12
17. C.-Y. Chang, F.-Y. Tsai, S.-J. Jhuo, and M.-J. Chen Org. Electron. 9 2008 667
18. Y. Xu, and C.B. Musgrave Chem. Mater. 16 2004 646
19. R. Cueff, G. Baud, M. Benmalek, J.P. Besse, J.R. Butruille, and M. Jacquet Appl. Surf. Sci. 115 1997 292
20. S.-M. Lee, G. Grass, G.-M. Kim, C. Dresbach, L. Zhang, U. Gösele, and M. Knez Phys. Chem. Chem. Phys. 11 2009 3608
21. L. Zhang, A.J. Patil, L. Li, A. Schierhorn, S. Mann, U. Gösele, and M. Knez Angew. Chem. Int. Ed. 48 2009 4982
22. S.-M. Lee, E. Pippel, U. Gösele, C. Dresbach, Y. Qin, C.V. Chandran, T. Bräuniger, G. Hause, and M. Knezl Science 324 2009 488
23. S.-M. Lee, E. Pippel, O. Moutanabbir, I. Gunkel, T. Thurn-Albrecht, and M. Knez Appl. Mater. Interfaces 2 2010 2436
24. R. Puurunen, W. Vandervorst, W. Besling, O. Richard, and O. Bender J. Appl. Phys. 96 2004 4878
25. Y. Du, X. Du, and S.M. George Thin Solid Films 491 2005 43
26. L.-S. Johansson, and J.M. Campbell Surf. Interface Anal. 36 2004 1018
27. G. Beamson, and D. Briggs High Resolution XPS of Organic Polymers 1992 Wiley Chichester
28. J. Zhou, B. Berry, J.F. Douglas, A. Karim, C.R. Snyder, and C. Soles Nanotechnology 19 2008 495703
29. T. Hirvikorpi, M. Vähä-Nissi, J. Vartiainen, P. Penttilä, J. Nikkola, A. Harlin, R. Serimaa, and M. Karppinen J. Appl. Polym. Sci. 122 2011 2221
30. J. Lahti Dry Toner-based Electrophotographic Printing on Extrusion Coated Paperboard 2005 Tampere University of Technology Tampere
31. M.J. Dreiling Surf. Anal. 71 1978 231
32. M. Abad, A. Ares, L. Barral, J. Cano, F.J. Díez, J. López, and C. Ramírez J. Appl. Polym. Sci. 85 2002 1553