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Volumn 12, Issue SUPPL. 2, 2012, Pages

A study of thin film encapsulation on polymer substrate using low temperature hybrid ZnO/Al 2O 3 layers atomic layer deposition

(5) Choi, Dong Won a Kim, Sang Jun a Lee, Ju Ho b Chung, Kwun Bum a Park, Jin Seong a

a Dankook University (South Korea)

b Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

Author keywords

Al 2O 3; Atomic layer deposition; Gas diffusion barrier; Thin film encapsulation; ZnO

Indexed keywords

ATOMIC LAYER DEPOSITION; BARRIER PROPERTIES; CRYSTALLINITIES; FILM CRYSTALLINITY; FILM STRESS; GAS BARRIER LAYERS; GAS DIFFUSION; LAMINATED FILMS; LAMINATED STRUCTURES; LOW TEMPERATURES; MULTI-LAMINATED; POLYMER SUBSTRATE; ROOT MEAN SQUARE; SINGLE LAYER; THIN FILM ENCAPSULATION; WATER VAPOR TRANSMISSION; ZNO; ZNO FILMS; ZNO LAYERS;

EID: 84867557177 PISSN: 15671739 EISSN: None Source Type: Journal
DOI: 10.1016/j.cap.2012.02.012 Document Type: Conference Paper

Times cited : (65)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.