Finite element modeling and experimental proof of NEMS-based silicon pillar resonators for nanoparticle mass sensing applications

Microsystem Technologies

Volumn 20, Issue 4-5, 2014, Pages 571-584

  Wasisto, Hutomo Suryo ^a   Huang, Kai ^a   Merzsch, Stephan ^a   Stranz, Andrej ^a   Waag, Andreas ^a   Peiner, Erwin ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

3 D model; Finite element modeling (FEM); Nanoparticle; Piezoelectric actuator; Resonant characteristics; Silicon nanopillar

Indexed keywords

ASPECT RATIO; FINITE ELEMENT METHOD; NANOPARTICLES; NATURAL FREQUENCIES; PIEZOELECTRIC ACTUATORS; RESONATORS; SENSORS; SILICON OXIDES; SILVER; STRUCTURAL OPTIMIZATION; TITANIUM DIOXIDE;

3-D MODELING; AEROSOL NANOPARTICLE; MASS LOADING EFFECTS; NANO ELECTROMECHANICAL SYSTEMS; NANOPILLAR; PIEZO-RESISTIVE CANTILEVERS; RESONANT CHARACTERISTICS; RESONANT FREQUENCY MEASUREMENTS;

LOADING;

EID: 84897499597     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-013-1992-8     Document Type: Conference Paper

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