The measurement of attogram mass accumulation on nanostructures during e-beam scanning, using carbon nanopillars in resonant mode

Nanotechnology

Volumn 20, Issue 34, 2009, Pages

  Banerjee, Amit ^a   Mankad, Tarun ^a   Dhamodaran, S ^a   Ramkumar, J ^a   Kulkarni, V N ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM CURRENTS; BEAM SCANNING; CARBON-NANOPILLARS; DIRECT MEASUREMENT; ELECTRON ENERGIES; HIGH-PRECISION MEASUREMENT; MASS ACCUMULATION RATES; MASS ACCUMULATIONS; NANOPILLARS; PARTIAL EXPOSURE; Q-FACTORS; RESIDUAL GAS; RESONANT MODE; TECHNOLOGICAL ASPECTS;

ELECTRON BEAMS; MONOLAYERS;

NANOSTRUCTURES;

CARBON; NANOMATERIAL;

ACCURACY; ANALYTIC METHOD; ARTICLE; ATTOGRAM; ELECTRON; ELECTRON BEAM; ENERGY; ENVIRONMENT; GAS; MASS; MEASUREMENT; PRIORITY JOURNAL; TECHNOLOGY; THICKNESS;

EID: 70249129388     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/34/345501     Document Type: Article

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