Femtogram aerosol nanoparticle mass sensing utilising vertical silicon nanowire resonators

Micro and Nano Letters

Volumn 8, Issue 10, 2013, Pages 554-558

  Wasisto, Hutomo Suryo ^a   Merzsch, Stephan ^a   Stranz, Andrej ^a   Waag, Andreas ^a   Uhde, Erik ^b   Salthammer, Tunga ^b   Peiner, Erwin ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b Wilhelm Klauditz Institut (WKI)   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOL NANOPARTICLE; DYNAMIC RESONANCES; FABRICATED SENSORS; FREQUENCY MEASUREMENT SYSTEMS; PIEZOELECTRIC SHEAR ACTUATORS; RESONANT FREQUENCY SHIFT; SAMPLING EFFICIENCY; VERTICALLY ALIGNED;

FABRICATION; GOLD COATINGS; INDUCTIVELY COUPLED PLASMA; NANOPARTICLES; NANOWIRES; NATURAL FREQUENCIES; RESONATORS; SENSORS; SILICON; ULTRASONIC APPLICATIONS;

AEROSOLS;

GOLD; NANOCOATING; NANOPARTICLE; NANOWIRE; SILICON; TITANIUM DIOXIDE;

AEROSOL; CONCENTRATION (PARAMETERS); CONFERENCE PAPER; FREEZE ETCHING; HEAT TREATMENT; NANODEVICE; NANOFABRICATION; OXIDATION; PARTICLE SIZE; PIEZOELECTRICITY; SENSOR; STATIC ELECTRICITY; ULTRASOUND; VERTICAL SILICON NANOWIRE RESONATOR;

EID: 84887059941     PISSN: None     EISSN: 17500443     Source Type: Journal    
DOI: 10.1049/mnl.2013.0208     Document Type: Conference Paper

References (7)

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