Silicon nanowire resonators: Aerosol nanoparticle mass sensing in the workplace

IEEE Nanotechnology Magazine

Volumn 7, Issue 2, 2013, Pages 18-23

  Wasisto, Hutomo S ^a   Merzsch, Stephan ^a   Stranz, Andrej ^a   Waag, Andreas ^a   Uhde, Erik ^b   Salthammer, Tunga ^b   Peiner, Erwin ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b Wilhelm Klauditz Institut (WKI)   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOL NANOPARTICLE; FREQUENCY MEASUREMENT SYSTEMS; INDUCTIVELY COUPLED PLASMA (ICP); PIEZOELECTRIC SHEAR ACTUATORS; RESONANT FREQUENCY SHIFT; SILICON NANOWIRES; THERMAL OXIDATION; TITANIUM DIOXIDES (TIO2);

GOLD COATINGS; INDUCTIVELY COUPLED PLASMA; NANOPARTICLES; NANOWIRES; NATURAL FREQUENCIES; RESONATORS; SENSORS; SILICON; ULTRASONIC APPLICATIONS;

AEROSOLS;

EID: 84880561729     PISSN: 19324510     EISSN: None     Source Type: Journal    
DOI: 10.1109/MNANO.2013.2260462     Document Type: Article

References (6)

1. M. P. Ling, C. P. Chio, W. C. Chou, W. Y. Chen, N. H. Hsieh, Y. J. Lin, and C. M. Liao, "Assessing the potential exposure risk and control for airborne titanium dioxide and carbon black nanoparticles in the workplace" Environ. Sci. Pollut. Res. Int. vol. 18, no. 6, pp. 877-889, 2011.
2. H. S. Wasisto, S. Merzsch, A. Waag, E. Uhde, T. Salthammer, and E. Peiner, "Airborne engineered nanoparticle mass sensor based on a silicon resonant cantilever" Sens. Actuators B, Chem., vol. 180, pp. 77-89, Apr. 2013. doi: 10.1016/j. snb.2012.04.003.
3. J. Zhou, C. S. Lao, P. Gao, W. Mai, W. L. Hughes, S. Z. Deng, N. S. Xu, and Z. L. Wang, "Nanowire as pico-gram balance at workplace atmosphere" Solid State Commun., vol. 139, no. 5, pp. 222-226, Aug. 2006. doi: 10.1016/j.ssc.2006.06.004. (Pubitemid 44037644)
4. A. Stranz, Ü. Siikmen, H.-H. Wehmann, A. Waag, and E. Peiner, "Fabrication and characterization of nanopillars for silicon-based thermoelectrics" J. Electron. Mater., vol. 39, no. 9, pp. 2013-2016. 2010. doi: 10.1007/sll664-009-1015-9.
5. H. S. Wasisto, S. Merzsch, A. Waag, E. Uhde, T. Salthammer, and E. Peiner, "Portable cantilever-based airborne nanoparticle detector" Sens. Actuators B, Chem., to be published, doi: 10.1016/j. snb.2012.09.074.
6. M. K. Ghatkesar, V. Barwich, T. Braun, J.-P. Pvamseyer, C. Gerber, M. Hegner, H. P. Lang, U. Drechsler, and M. Despont, "Higher modes of vibration increase mass sensitivity in nanome-chanical microcantilevers" Nanotechnology, vol. 18. no. 44, pp. 445-502, Nov. 2007