Selective modal excitation in coupled piezoelectric microcantilevers

Microsystem Technologies

Volumn 18, Issue 7-8, 2012, Pages 917-921

  Gil, M ^a   Manzaneque, T ^a   Hernando Garcia J ^a   Ababneh, A ^b   Seidel, H ^c   Sanchez Rojas J L ^a  

^a UNIVERSITY OF CASTILLA LA MANCHA   (Spain)

^b YARMOUK UNIVERSITY   (Jordan)

^c SAARLAND UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION SIGNALS; ALN; DOPPLER; MICRO-CANTILEVERS; MULTIPLE ELECTRODES; OPTICAL CHARACTERIZATION; PIEZOELECTRIC RESONATORS; QUALITY FACTORS; SELECTIVE EXCITATIONS; VIBRATION MODES; VIBROMETERS;

COMPOSITE MICROMECHANICS;

PIEZOELECTRICITY;

EID: 84864603569     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-011-1411-y     Document Type: Conference Paper

References (9)

1. Beardslee LA et al (2010) Geometrical optimization of resonant cantilevers vibrating in in-plane flexural modes. IEEE Sens 2010:1996-1999
2. Castellanos-Gómez A, Agraït N, Rubio-Bollinger G (2009) Dynamics of quartz tuning fork force sensors used in scanning probe microscopy. Nanotechnology 20:215502
3. Dufour M, Heinrich SM, Josse F (2007) Theoretical analysis of strong-axis bending mode vibrations for resonant microcantilever (bio) chemical sensors in gas or liquid phase. J Microelectromech Syst 16:1
4. Karrai K, Grober RD (2005) Piezoelectric tip-sample distance control for near field optical microscopes. Appl Phys Lett 66(14):1842-1844
5. Leighton GJT, Kirby PB, Fox CHJ (2007) In-plane excitation of thin silicon cantilevers using piezoelectric thin films. Appl Phys Lett 91:183510
6. Leissa AW 1969 Vibration of plates NASA Technical Report SP160
7. Momosaki E (1997) A brief review of progress in quartz tuning fork resonators. In: Proceedings of the 1997 IEEE international frequency control symposium, pp 552-565
8. Sánchez-Rojas JL et al (2010) Modal optimization and filtering in piezoelectric microplate resonators. J Micromech Microeng 20:055027
9. Vignola JF, Judge JA (2008) Architectural considerations of microand nanoresonators for mass detection in the presence of a fluid. J Appl Phys 104:124305