Mechanical behavior and anisotropy of spin-coated SU-8 thin films for MEMS

Journal of Microelectromechanical Systems

Volumn 23, Issue 1, 2014, Pages 168-180

  Robin, C J ^a   Vishnoi, Aakansha ^a   Jonnalagadda, Krishna N ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

Anisotropy; cross linking; digital image correlation; strain rate; SU 8

Indexed keywords

EID: 84894064929     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2013.2264341     Document Type: Article

References (45)

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