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Applied Physics A: Materials Science and Processing

Volumn 95, Issue 3, 2009, Pages 673-680

The influence of hard-baking temperature applied for SU8 sensor layer on the sensitivity of capacitive chemical sensor

(4) Klanjšek Gunde, Marta a Hauptman, Nina a MačEk, Marijan b Kunaver, Matjaž a

a NATIONAL INSTITUTE OF CHEMISTRY (Slovenia)

b UNIVERSITY OF LJUBLJANA (Slovenia)

Author keywords

[No Author keywords available]

Indexed keywords

BAKING PROCESS; BAKING TEMPERATURES; CHEMICAL STRUCTURES; CMOS TECHNOLOGIES; CROSS-LINKED STRUCTURES; DEGRADATION TEMPERATURES; FOURIER-TRANSFORM INFRARED SPECTROSCOPIES; SENSOR LAYERS; TEMPERATURE-DEPENDENT CHANGES; UV PHOTOSENSITIVE;

CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; CROSSLINKING; DEGRADATION; FOURIER TRANSFORMS; INFRARED SPECTROSCOPY; SPECTROSCOPIC ANALYSIS; VOLATILE ORGANIC COMPOUNDS;

CHEMICAL COMPOUNDS;

EID: 63949083632 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-008-4966-4 Document Type: Article

Times cited : (29)

References (33)

1
- 63849344980
- US patent No. 5304457
- R.A. Day, J.D. Gelorme, D.A. Russel, S.J. Witt, US patent No. 5304457 (1994)
- (1994)
- Day, R.A.¹ Gelorme, J.D.² Russel, D.A.³ Witt, S.J.⁴

2
- 0030646206
- J.M. Shaw J.D. Gelorme N.C. LaBianca W.E. Conley S.J. Holmes 1997 IBM J. Res. Develop. 41 81
- (1997) IBM J. Res. Develop. , vol.41 , pp. 81
- Shaw, J.M.¹ Gelorme, J.D.² Labianca, N.C.³ Conley, W.E.⁴ Holmes, S.J.⁵

3
- 0038798179
- K.Y. Lee N. LaBianca S.A. Rishton S. Zolgharnain J.D. Gelorme J. Shaw T.H.P. Chang 1995 J. Vac. Sci. Technol. B 13 3012
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 3012
- Lee, K.Y.¹ Labianca, N.² Rishton, S.A.³ Zolgharnain, S.⁴ Gelorme, J.D.⁵ Shaw, J.⁶ Chang, T.H.P.⁷

4
- 0037830590
- L. Singleton 2003 J. Photopolym. Sci. Technol. 16 413
- (2003) J. Photopolym. Sci. Technol. , vol.16 , pp. 413
- Singleton, L.¹

5
- 49949111063
- E. Reznikova J. Mohr M. Boerner V. Nazimov P.J. Jakobs 2008 Microsyst. Technol. 14 1683
- (2008) Microsyst. Technol. , vol.14 , pp. 1683
- Reznikova, E.¹ Mohr, J.² Boerner, M.³ Nazimov, V.⁴ Jakobs, P.J.⁵

6
- 33847271606
- K.D. Vora A.G. Peele B.Y. Shew E.C. Harvey J.P. Hayes 2007 Microsyst. Technol. 13 487
- (2007) Microsyst. Technol. , vol.13 , pp. 487
- Vora, K.D.¹ Peele, A.G.² Shew, B.Y.³ Harvey, E.C.⁴ Hayes, J.P.⁵

7
- 0007897903
- C. Cremers F. Boumrane L. Singleton R. Schenk 2001 Microsyst. Technol. 7 11
- (2001) Microsyst. Technol. , vol.7 , pp. 11
- Cremers, C.¹ Boumrane, F.² Singleton, L.³ Schenk, R.⁴

8
- 63949085138
- SU8, Thick photo-resist for MEMS, http://memscyclopedia.org/su8.html
- SU8, Thick Photo-resist for MEMS

9
- 63949086765
- SU-8 Photoresist Product Line (MicroChem), http://www.microchem.com/ products/su-eight.htm
- SU-8 Photoresist Product Line (MicroChem)

10
- 3042771409
- S.K. Rath F.Y.C. Boey M.J.M. Abadie 2004 Polym. Int. 53 857
- (2004) Polym. Int. , vol.53 , pp. 857
- Rath, S.K.¹ Boey, F.Y.C.² Abadie, M.J.M.³

11
- 0037231215
- R. Feng R.J. Farris 2003 J. Micromech. Microeng. 13 80
- (2003) J. Micromech. Microeng. , vol.13 , pp. 80
- Feng, R.¹ Farris, R.J.²

12
- 9744231510
- T.L. Tan D. Wong P. Lee R.S. Rawat A. Pantran 2004 Appl. Spectrosc. 58 1288
- (2004) Appl. Spectrosc. , vol.58 , pp. 1288
- Tan, T.L.¹ Wong, D.² Lee, P.³ Rawat, R.S.⁴ Pantran, A.⁵

13
- 63949087608
- L. Dellmann S. Roth C. Beuret G.A. Racine H. Lorenz M. Despont P. Renaud P. Vettinger N.F. de Rooij 1989 Sens. Actuators A 70 42
- (1989) Sens. Actuators A , vol.70 , pp. 42
- Dellmann, L.¹ Roth, S.² Beuret, C.³ Racine, G.A.⁴ Lorenz, H.⁵ Despont, M.⁶ Renaud, P.⁷ Vettinger, P.⁸ De Rooij, N.F.⁹

14
- 0031674888
- H. Lorentz M. Despont N. Fahrni J. Brugger P. Vettinger P. Renaud 1998 Sens. Actuators A 64 33
- (1998) Sens. Actuators A , vol.64 , pp. 33
- Lorentz, H.¹ Despont, M.² Fahrni, N.³ Brugger, J.⁴ Vettinger, P.⁵ Renaud, P.⁶

15
- 28444449489
- E. Koukharenko M. Kraft G.J. Ensell N. Hollinshead 2005 J. Mater. Sci.: Mater. Electron. 16 741
- (2005) J. Mater. Sci.: Mater. Electron. , vol.16 , pp. 741
- Koukharenko, E.¹ Kraft, M.² Ensell, G.J.³ Hollinshead, N.⁴

16
- 24944450965
- R. Guerre C. Hilbert Y. Burri Ph. Flückinger Ph. Renaud 2005 Sens. Actuators A 123 570
- (2005) Sens. Actuators A , vol.123 , pp. 570
- Guerre, R.¹ Hilbert, C.² Burri, Y.³ Flückinger, Ph.⁴ Renaud, Ph.⁵

17
- 33244491675
- J.M. Ruano-Lopez M. Aguirregabiria M. Tijero M.Z. Arroyo J. Elizalde J. Berganzo I. Aranburu F.J. Blanco K. Mayora 2006 Sens. Actuators B 114 542
- (2006) Sens. Actuators B , vol.114 , pp. 542
- Ruano-Lopez, J.M.¹ Aguirregabiria, M.² Tijero, M.³ Arroyo, M.Z.⁴ Elizalde, J.⁵ Berganzo, J.⁶ Aranburu, I.⁷ Blanco, F.J.⁸ Mayora, K.⁹

18
- 0035014968
- J. Zhang K.L. Tan H.Q. Gong 2001 Polym. Test. 20 693
- (2001) Polym. Test. , vol.20 , pp. 693
- Zhang, J.¹ Tan, K.L.² Gong, H.Q.³

19
- 33748191746
- N. Arana D. Puente I. Ayerdi E. Castano J. Berganzo 2006 Sens. Actuators B 118 374
- (2006) Sens. Actuators B , vol.118 , pp. 374
- Arana, N.¹ Puente, D.² Ayerdi, I.³ Castano, E.⁴ Berganzo, J.⁵

20
- 33646020698
- J.H.T. Ransley M. Watari D. Sukumaran R.A. McKendry A.A. Seshia 2006 Microelectron. Eng. 83 1621
- (2006) Microelectron. Eng. , vol.83 , pp. 1621
- Ransley, J.H.T.¹ Watari, M.² Sukumaran, D.³ McKendry, R.A.⁴ Seshia, A.A.⁵

21
- 10844240672
- K.K. Tung W.H. Wong E.Y.B. Pun 2005 Appl. Phys. A 80 621
- (2005) Appl. Phys. A , vol.80 , pp. 621
- Tung, K.K.¹ Wong, W.H.² Pun, E.Y.B.³

22
- 33646243258
- K.H. Jeong J. Kim L.P. Lee 2006 Science 312 557
- (2006) Science , vol.312 , pp. 557
- Jeong, K.H.¹ Kim, J.² Lee, L.P.³

23
- 28044455656
- J. Simčič P. Pelicon Z. Rupnik M. Mihelič A. Razpet D. Jenko M. Maček 2005 Nucl. Instrum. Methods Phys. Res. B 241 479
- (2005) Nucl. Instrum. Methods Phys. Res. B , vol.241 , pp. 479
- Simčič, J.¹ Pelicon, P.² Rupnik, Z.³ Mihelič, M.⁴ Razpet, A.⁵ Jenko, D.⁶ MačEk, M.⁷

24
- 27244442230
- T. Kondo S. Juodkazis H. Misawa 2005 Appl. Phys. A 81 1583
- (2005) Appl. Phys. A , vol.81 , pp. 1583
- Kondo, T.¹ Juodkazis, S.² Misawa, H.³

25
- 6344267073
- C.H. Lee T.W. Chang K.L. Lee J.Y. Lin J. Wang 2004 Appl. Phys. A 79 2027
- (2004) Appl. Phys. A , vol.79 , pp. 2027
- Lee, C.H.¹ Chang, T.W.² Lee, K.L.³ Lin, J.Y.⁴ Wang, J.⁵

26
- 34249937933
- G. Cavalli S. Banu R.T. Ranasinghe G.R. Broder H.F.P. Martins C. Neylon H. Morgan M. Bradley P.L. Roach 2007 J. Comb. Chem. 9 462
- (2007) J. Comb. Chem. , vol.9 , pp. 462
- Cavalli, G.¹ Banu, S.² Ranasinghe, R.T.³ Broder, G.R.⁴ Martins, H.F.P.⁵ Neylon, C.⁶ Morgan, H.⁷ Bradley, M.⁸ Roach, P.L.⁹

27
- 33746895166
- S. Jiguet A. Bertsch M. Judelewicz H. Hofmann P. Renaud 2006 Microelectron. Eng. 83 1966
- (2006) Microelectron. Eng. , vol.83 , pp. 1966
- Jiguet, S.¹ Bertsch, A.² Judelewicz, M.³ Hofmann, H.⁴ Renaud, P.⁵

28
- 63949086146
- M. Klanjšek Gunde, N. Hauptman, M. Maček, Proc. SPIE 68820M (2008)
- (2008) Proc. SPIE 68820M
- M. Klanjšek Gunde¹

29
- 41149130509
- IMAPS Washington
- M. Maček, M. Klanjšek Gunde, N. Hauptman, in EMPC 2007, The 16th European Microelectronics and Packaging Conference & Exhibition, June 17-20, 2007, Oulu, Finland. Proceedings (IMAPS, Washington, 2007), pp. 389-393
- (2007) EMPC 2007, the 16th European Microelectronics and Packaging Conference & Exhibition, June 17-20, 2007, Oulu, Finland. Proceedings , pp. 389-393
- MačEk, M.¹ Klanjšek Gunde, M.² Hauptman, N.³

30
- 63949085968
- Konstantklimate über wäßrigen Lösungen; Gesättigte Salzlösungen, Glycerinlösungen, DIN 50 008, teil 1, 2
- Klimate und ihre technische Anwendung; Konstantklimate über wäßrigen Lösungen; Gesättigte Salzlösungen, Glycerinlösungen, DIN 50 008, teil 1, 2 (1981)
- (1981) Klimate und Ihre Technische Anwendung

31
- 0003444323
- Academic Boston
- N.B. Colthup, L.H. Daily, S.E. Wiberley, Introduction to Infrared and Raman Spectroscopy (Academic, Boston, 1990)
- (1990) Introduction to Infrared and Raman Spectroscopy
- Colthup, N.B.¹ Daily, L.H.² Wiberley, S.E.³

32
- 0004255110
- Cambridge University Press Cambridge
- D.I. Bower, W.F. Maddams, The Vibrational Spectroscopy of Polymers (Cambridge University Press, Cambridge, 1989)
- (1989) The Vibrational Spectroscopy of Polymers
- Bower, D.I.¹ Maddams, W.F.²

33
- 63949088436
- FTIR Spectra, Hummel Industrial Polymers (1997-1999)
- (1997) FTIR Spectra, Hummel Industrial Polymers

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