Comparison of methods for the mechanical characterization of polymers for MEMS applications

Journal of Micromechanics and Microengineering

Volumn 21, Issue 11, 2011, Pages

  Wouters, Kristof ^a   Gijsenbergh, Pieter ^a   Puers, Robert ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

COMPARISON OF METHODS; CONTINUOUS STIFFNESS MEASUREMENT; DYNAMIC TENSILE TEST; LOADING SPEED; MECHANICAL BEHAVIOR; MECHANICAL CHARACTERIZATIONS; MEMS APPLICATIONS; PHOTO-DEFINABLE; POLYMER CHARACTERIZATION; STATIC TENSILE TESTS; STIFFNESS MEASUREMENTS; TENSILE TESTS;

EXPERIMENTS; NANOINDENTATION; POLYMERS; STIFFNESS; TENSILE TESTING;

DYNAMICS;

EID: 80555123613     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/11/115027     Document Type: Article

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