Adjustable refractive index modulation for a waveguide with SU-8 photoresist by dual-UV exposure lithography

Applied Optics

Volumn 45, Issue 31, 2006, Pages 8036-8039

  Ong, Biow Hiem ^a   Yuan, Xiaocong ^a   Tjin, Swee Chuan ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DENSIFICATION; LIGHT MODULATION; OPTICAL DEVICES; OPTICAL INTERCONNECTS; OPTICAL SENSORS; OPTICAL WAVEGUIDES; PHOTOLITHOGRAPHY; REFRACTIVE INDEX; WAVE PROPAGATION;

INTEGRATED OPTICAL SENSORS; REFRACTIVE INDEX MODULATION; THERMAL DENSIFICATION;

PHOTORESISTS;

EID: 33845587749     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.008036     Document Type: Article

References (9)

1. B. Y. Shew, C. H. Kuo, Y. C. Huang, and Y. H. Tsai, "UV-LIGA interferometer biosensor based on the SU-8 optical waveguide," Sens. Actuators A 120, 383-389 (2005).
2. S. Kawata and T. Tani, "Optically driven Mie particles in an evanescent field along a channel waveguide," Opt. Lett. 21, 1768-1770 (1996).
3. R. M. Almeida, "Sol-gel planar waveguides for integrated optics," J. Non-Cryst. Solids 259, 176-181 (1999).
4. J.-S. Koo, P. G. R. Smith, R. B. Williams, C. Riziotis, and M. C. Grossel, "UV written waveguides using crosslinkable PMMA-based copolymers, Opt. Mater. 23, 583-592 (2003).
5. R. V. Ramaswamy and R. Srivastava, "Recent advances in ionexchanged optical waveguides and components," J. Mod. Opt. 35, 1049-1067 (1988).
6. J.-S. Kim, J.-W. Kang, and J.-J. Kim, "Simple and low cost fabrication of thermally stable polymeric multimode waveguides using a UV-curable epoxy," Jpn. J. Appl. Phys. Part 142, 1277-1279 (2003).
7. Ru Feng and R. J. Farris, "Influence of processing conditions on the thermal and mechanical properties of SU8 negative photoresist coatings," J. Micromech. Microeng. 13, 80-88 (2003).
8. J. de Boer, R. J. Visser, and G. P. Melis, "Time-resolved determination of volume shrinkage and refractive index change of thin polymer films during photopolymerization," Polymer 33, 1123-1126 (1992).
9. B. H. Ong, X.-C. Yuan, S. H. Tao, and S. C. Tjin, "Photothermally enabled lithography for refractive-index modulation in SU-8 photoresist," Opt. Lett. 31, 1367-1369 (2006).