Surface graft polymerization of SU-8 for bio-MEMS applications

Journal of Micromechanics and Microengineering

Volumn 17, Issue 7, 2007, Pages 1371-1380

  Wang, Yuli ^a,b   Pai, Jeng Hao ^c   Lai, Hsuan Hong ^c   Sims, Christopher E ^a   Bachman, Mark ^b,c   Li, G P ^b,c   Allbritton, Nancy L ^a,b,c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c University of California at Irvine   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERIUM COMPOUNDS; OXIDATION; PHOTORESISTORS; POLYMERIZATION; SURFACE PROPERTIES; SURFACE TREATMENT;

CERIUM(IV) AMMONIUM NITRATE (CAN); SURFACE GRAFT POLYMERIZATION; SURFACE HYDROXYL GROUPS; WATER SOLUBLE POLYMERS;

MEMS;

EID: 34547606640     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/7/020     Document Type: Article

References (49)

1. Lorenz H, Despont M, Fahrni N, LaBianca N, Renaud P and Vettiger M 1997 J. Micromech. Microeng. 7 121-4
2. Shaw J M, Gelorme J D, LaBianca N C, Conley W E and Holmes S J 1997 IBM J. Res. Dev. 41 81-94
3. Kotzar G, Freas M, Abel P, Fleischman A, Roy S, Zorman C, Moran J M and Melzak J 2002 Biomaterials 23 2737-50
4. Voskerician G, Shive M S, Shawgo R S, von Recum H, Anderson J M, Cima M J and Langer R 2003 Biomaterials 24 1959-67
5. Belanger M C and Marois Y J 2001 Biomed. Mater. Res. 58 467-77
6. Liu J, Bian C, Han J, Chen S and Xia S 2005 Sensors Actuators B 106 591-601
7. Kim G M, Kim B, Liebau M, Huskens J, Reinhoudt D N and Brugger J J 2002 Microelectromech. Syst. 11 175-81
8. Zhang J, Tan K L and Gong H Q 2001 Polym. Test. 20 693-701
9. El-Ali J, Perch-Nielsen I R, Poulsen C R, Bang D D, Telleman P and Wolff A 2004 Sensors Actuators A 110 3-10
10. Wakamoto Y, Inoue I, Moriguchi H and Yasuda K 2001 Fresenius J. Anal. Chem. 371 276-81
11. Marie R, Schmid S, Johansson A, Ejsing L, Nordstrom M, Hafliger D, Christensen C, Boisen A and Dufva M 2006 Biosens. Bioelectron. 21 1327-32
12. Kastantin M J, Li S, Gadre A P, Wu L Q, Bentley W E, Payne G F, Rubloff G W and Ghodssi R 2003 Sens. Mater. 15 295-301
13. Tseng F G, Lin K H, Hsu H T and Chieng C C 2004 Sensors Actuators A 111 107-17
14. Carlier J, Arscott S, Thomy V, Camart J C, Cren-Olive C and Le Gac S J 2005 J. Chromatogr. A 1071 213-22
15. Wu Z Z, Zhao Y and Kisaalita W S 2006 Colloids Surf. B 52 14-21
16. Chronis N and Lee L P 2005 J. Microelectromech. Syst. 14 857-63
17. Xu B, Lee Y K, Jin Q, Zhao J and Ho C M 2006 Sensors Actuators A 132 714-25
18. Calleja M, Nordstroem M, Alvarez M, Tamayo J, Lechuga L M and Boisen A 2005 Ultramicroscopy 105 215-22
19. Salazar G T, Wang Y, Young G, Bachman M, Sims C E, Li G P and Allbritton N L 2007 Anal. Chem. 79 682-7
20. Slentz B E, Penner N A and Regnier F E 2002 J. Chromatogr. A 948 225-33
21. Nordstrom M, Marie R, Calleja M and Boisen A 2004 J. Micromech. Microeng. 14 1614-7
22. Hu S, Ren X, Bachman M, Sims C E, Li G P and Allbritton N L 2003 Electrophoresis 24 3679-88
23. Whitesides G M, Ostuni E, Shuichi T, Jiang X and Ingber D E 2001 Annu. Rev. Biomed. Eng. 3 335-73
24. Wang Y, Sims C E, Marc P, Bachman M, Li G P and Allbritton N L 2006 Langmuir 22 8257-62
25. Joshi M, Kale N, Lal R, Rao V R and Mukherji S 2007 Biosens. Bioelectron. 22 2429-35
26. Joshi M, Pinto R, Rao V R and Mukherji S 2007 Appl. Surf. Sci. 253 3127-32
27. Stangegaard M, Wang Z, Kutter J P, Dufva M and Wolff A 2006 Mol. Biosyst. 2 421-8
28. Ikada Y 1994 Biomaterials 15 725-36
29. Wang Y, Bachman M, Sims C E, Li G P and Allbritton N L 2006 Langmuir 22 2719-25
30. Datasheet SU-8 Photoresist Formulations http://wwwmicrochemcom/products/ su_eighthtm
31. Tuomikoski S and Franssila S 2005 Sensors Actuators A 120 408-15
32. Sikanen T, Tuomiokoski S, Ketola R A, Kostiainen R, Franssila S and Kotiaho T 2005 Lab Chip 5 888-96
33. Uchida E, Uyama Y and Ikada Y 1993 Langmuir 9 1121-4
34. Tan T L, Wong D, Lee P, Rawat R S and Patran A 2004 Appl. Spectrosc. 58 1288-94
35. Dektar J L and Hacker N P 1990 J. Am. Chem. Soc. 112 6004-15
36. Feng R and Farris R J 2003 J. Micromech. Microeng. 13 80-8
37. Francisco M A and Krylowski J 2005 Ind. Eng. Chem. Res. 44 5439-46
38. Iranpoor N, Baltork I M and Zardaloo F S 1991 Tetrahedron 47 9861-6
39. Iranpoor N and Salehi P 1995 Tetrahedron 51 909-12
40. Clemence L J, Eldridge R J and Lydiate J 1984 React. Polym. 2 197-207
41. Kurita K, Kawata M, Koyama Y and Nishimura S 1991 J. Appl. Polym. Sci. 42 2885-91
42. Don T M, King C F and Chiu W Y 2002 J. Appl. Polym. Sci. 86 3057-63
43. Mino G and Kaizerman S 1958 J. Polym. Sci. 31 242-3
44. Kurita K, Kawata M, Koyama Y and Nishimura S I 1991 J. Appl. Polym. Sci. 42 2885-91
45. Daimay L V, Colthup N B, Fatelry W G and Grasselli J G 1991 The Handbook of Infrared and Raman Characteristic Frequencies of Organic Molecules (Boston, MA: Academic)
46. Ingle J D and Crouch S R 1988 Spectrochemical Analysis (Englewood Cliffs, NJ: Prentice-Hall) chapter 14
47. Dai J, Bao Z, Sun L, Hong S U, Baker G L and Bruening M L 2006 Langmuir 22 4274-81
48. Miller J C, Zhou H, Kwekel J, Cavallo R, Burke J, Butler E B, Teh B S and Haab B B 2003 Proteomics 3 56-63
49. http://lasperkinelmercom/content/RelatedMaterials/Brochures/ FLY_HydroGelCoatedSlidespdf