A high aspect ratio SU-8 fabrication technique for hollow microneedles for transdermal drug delivery and blood extraction

Journal of Micromechanics and Microengineering

Volumn 20, Issue 6, 2010, Pages

  Chaudhri, Buddhadev Paul ^a,b   Ceyssens, Frederik ^a   De Moor, Piet ^b   Van Hoof, Chris ^a,b   Puers, Robert ^a,b  

^a Katholieke Universiteit Leuven   (Belgium)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BLOOD EXTRACTION; BLOOD SAMPLING SYSTEM; FABRICATION TECHNIQUE; HIGH ASPECT RATIO; MICRONEEDLES; NEGATIVE PHOTORESISTS; POLYMER MATERIALS; PROTEIN DRUGS; REAL-TIME FEEDBACK; SU-8 POLYMER; TRANSDERMAL DRUG DELIVERY;

BIOLOGICAL MATERIALS; BLOOD; DRUG DELIVERY; FABRICATION; NEEDLES; PHOTORESISTS;

ASPECT RATIO;

EID: 78650406419     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/6/064006     Document Type: Article

References (11)

1. Zahn J D et al 2000 Microfabricated polysilicon microneedles for minimally invasive biomedical devices Biomed. Microdevices 2 295-303
2. Stoeber B et al 2000 Two-dimensional arrays out of plane needles ASME Int. Mechanical Engineering Congress and Exposition, MEMS (Orlando, FL)
3. Park J-H et al 2005 Biodegradable polymer microneedles: fabrication, mechanics and transdermal drug delivery J. Control. Release 104 51-66
4. Ratner B D et al 1996 Biomaterials Science: An Introduction to Materials in Medicine (New York: Academic)
5. Wouters K and Puers R 2009 Determing the Young's modulus and creep effects in three different photo-definable epoxies for MEMS applications Sensors Actuators A, doi: 10.1016/j.sna.2009.03.021
6. Roch I 2003 Fabrication and characterization of an SU-8 gripper actuated by a shape memory alloy thin film J. Micromech. Microeng. 13 330
7. Swaminathan V S 2006 Mechanics of a mosquito bite MS Thesis Department of Mechanical Engineering, North Caroline State University, USA http://www.lib.ncsu.edu/theses/available/etd-04272006-144238/unrestricted/etd. pdf
8. Davies S P et al 2004 Insertion of microneedles into skin: measurement and prediction of insertion force and needle fracture force J. Biomech. 37 1155-63
9. Becnel C, Desta Y and Kelly K 2005 Ultra-deep x-ray lithography of densely packed SU-8 features: I. An SU-8 casting procedure to obtain uniform solvent content with accompanying experimental results J. Micromech. Microeng. 15 1242-8
10. Yang R and Wang W 2005 A numerical and experimental study on gap compensation and wavelength selection in UV-lithography of ultra-high aspect ratio SU-8 microstructures Sensors Actuators B 110 279-88
11. Hausrath A H and Dittoe A F 1962 Development of design strength levels for the elasticity stability of monocoque cnes under axial compression. Collected Papers on Instability for Shell Structures, National Aeronautics and Space Administration Technical Note D-1510 pp 45-6