Processing of thin SU-8 films

Journal of Micromechanics and Microengineering

Volumn 18, Issue 12, 2008, Pages

  Keller, Stephan ^a   Blagoi, Gabriela ^a   Lillemose, Michael ^a   Haefliger, Daniel ^a   Boisen, Anja ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

FOURIER TRANSFORMS; INFRARED SPECTROSCOPY; MOLECULAR BEAM EPITAXY; OPTIMIZATION; PROCESS CONTROL; SOLVENTS; SPECTROSCOPIC ANALYSIS; STABILITY; STEEL SHEET; STRUCTURAL OPTIMIZATION; X RAY LITHOGRAPHY;

ACID DIFFUSIONS; AMBIENT TEMPERATURES; EXPOSURE DOSES; FOURIER-TRANSFORM; FREE STRUCTURES; HIGH TEMPERATURES; LITHOGRAPHIC RESOLUTIONS; OPTIMIZED PROCESSES; PROCESS OPTIMIZATIONS; PROCESSING PARAMETERS; RESIDUAL FILM STRESSES; SOLVENT EVAPORATIONS; STRUCTURAL STABILITIES;

PHOTORESISTS;

EID: 58149394982     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/12/125020     Document Type: Article

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