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Volumn 103, Issue 26, 2013, Pages

Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITED; CONFORMAL COATINGS; ELECTRONIC DEVICE; ISLAND FORMATION; NANOELECTRONIC DEVICES; STORAGE ELEMENTS; THREE-DIMENSIONAL STRUCTURE; TRIMETHYLALUMINUM;

EID: 84891600492     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4858964     Document Type: Article
Times cited : (16)

References (27)
  • 1
    • 0002572435 scopus 로고
    • 10.1016/0040-6090(92)90874-B
    • T. Suntola, Thin Solid Films 216, 84 (1992). 10.1016/0040-6090(92)90874-B
    • (1992) Thin Solid Films , vol.216 , pp. 84
    • Suntola, T.1
  • 2
    • 0037156103 scopus 로고    scopus 로고
    • 10.1016/S0040-6090(02)00117-7
    • M. Leskela and M. Ritala, Thin Solid Films 409, 138 (2002). 10.1016/S0040-6090(02)00117-7
    • (2002) Thin Solid Films , vol.409 , pp. 138
    • Leskela, M.1    Ritala, M.2
  • 3
    • 21744444606 scopus 로고    scopus 로고
    • 10.1063/1.1940727
    • R. L. Puurunen, J. Appl. Phys. 97, 121301 (2005). 10.1063/1.1940727
    • (2005) J. Appl. Phys. , vol.97 , pp. 121301
    • Puurunen, R.L.1
  • 4
    • 75649140552 scopus 로고    scopus 로고
    • 10.1021/cr900056b
    • S. M. George, Chem. Rev. 110, 111 (2010). 10.1021/cr900056b
    • (2010) Chem. Rev. , vol.110 , pp. 111
    • George, S.M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.