Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes

IEEE International Conference on Automation Science and Engineering

Volumn , Issue , 2013, Pages 201-206

  Susto, Gian Antonio ^a   Johnston, Adrian B ^b   O'Hara, Paul G ^b   McLoone, Sean ^c,d  

^a UNIVERSITY OF PADOVA   (Italy)

^b Seagate Technology Derry   (Ireland)

^c NATIONAL UNIVERSITY OF IRELAND   (Ireland)

^d QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

Elastic Nets; LASSO; Regularization Methods; Ridge Regression; Semiconductor Manufacturing; System Identification; Virtual Metrology

Indexed keywords

ELASTIC NET; LASSO; REGULARIZATION METHODS; RIDGE REGRESSION; SEMICONDUCTOR MANUFACTURING; VIRTUAL METROLOGY;

IDENTIFICATION (CONTROL SYSTEMS); PROCESS MONITORING; REGRESSION ANALYSIS; SEMICONDUCTOR DEVICE MANUFACTURE; UNITS OF MEASUREMENT;

FABRICATION;

EID: 84891521136     PISSN: 21618070     EISSN: 21618089     Source Type: Conference Proceeding    
DOI: 10.1109/CoASE.2013.6653980     Document Type: Conference Paper

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