Data Mining and Support Vector Regression Machine Learning in Semiconductor Manufacturing to improve virtual metrology

Proceedings of the Annual Hawaii International Conference on System Sciences

Volumn , Issue , 2013, Pages 3447-3456

  Lenz, Benjamin ^a,b   Barak, Bernd ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

^b UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADVANCED PROCESS CONTROL; HIGH DENSITY PLASMA CHEMICAL VAPOR DEPOSITION; KNOWLEDGE DISCOVERY IN DATABASE; MACHINE LEARNING METHODS; REGRESSION ALGORITHMS; SEMICONDUCTOR MANUFACTURING; SUPPORT VECTOR REGRESSION (SVR); SUPPORT VECTOR REGRESSION MACHINES;

CHEMICAL VAPOR DEPOSITION; DATA MINING; INTELLIGENT CONTROL; PLASMA CVD; REGRESSION ANALYSIS; SEMICONDUCTOR DEVICE MANUFACTURE;

LEARNING SYSTEMS;

EID: 84875518690     PISSN: 15301605     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/HICSS.2013.163     Document Type: Conference Paper

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