Multilevel kernel methods for Virtual Metrology in semiconductor manufacturing

IFAC Proceedings Volumes (IFAC-PapersOnline)

Volumn 44, Issue 1 PART 1, 2011, Pages 11614-11621

  Schirru, Andrea ^a   Pampuri, Simone ^a   De Luca, Cristina ^b   De Nicolao, Giuseppe ^a  

^a UNIVERSITY OF PAVIA   (Italy)

^b INFINEON TECHNOLOGIES AUSTRIA AG   (Austria)

Author keywords

Computer aided manufacturing; Industry automation; Machine learning; Probabilistic models; Semiconductors

Indexed keywords

COMPUTER AIDED INSTRUCTION; COMPUTER AIDED MANUFACTURING; MULTI-TASK LEARNING; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR MATERIALS; VIRTUAL MACHINE;

DATA HETEROGENEITY; EQUIPMENT LOGISTICS; FUNCTION REGRESSION; HIGH DIMENSIONAL SPACES; INDUSTRY AUTOMATION; PROBABILISTIC MODELS; RELIABLE ESTIMATES; SEMICONDUCTOR MANUFACTURING;

LEARNING SYSTEMS;

EID: 84866754326     PISSN: 14746670     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.3182/20110828-6-IT-1002.01339     Document Type: Conference Paper

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