A predictive maintenance system for silicon epitaxial deposition

IEEE International Conference on Automation Science and Engineering

Volumn , Issue , 2011, Pages 262-267

  Susto, Gian Antonio ^a   Beghi, Alessandro ^a   De Luca, Cristina ^b  

^a UNIVERSITY OF PADOVA   (Italy)

^b INFINEON TECHNOLOGIES AUSTRIA AG   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL DEPOSITION; GAUSSIAN KERNELS; KALMAN PREDICTOR; PARTICLE FILTER; PREDICTION TECHNIQUES; PREDICTIVE MAINTENANCE; PROCESS BEHAVIOR; SCHEDULING CONTROL; WAFER TEMPERATURE;

BEHAVIORAL RESEARCH; EPITAXIAL GROWTH; MAINTENANCE; SEMICONDUCTING SILICON COMPOUNDS;

SILICON WAFERS;

EID: 82455175459     PISSN: 21618070     EISSN: 21618089     Source Type: Conference Proceeding    
DOI: 10.1109/CASE.2011.6042421     Document Type: Conference Paper

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