Fundamentals on Plasma Deposition of Fluorocarbon Films

Advanced Plasma Technology

Volumn , Issue , 2008, Pages 175-195

  Milella, Antonella ^a   Palumbo, F ^b   D'Agostino, Riccardo ^a  

^a UNIVERSITY OF BARI   (Italy)

^b CNR   (Italy)

Author keywords

Continuous discharges; Fluorocarbon films; Glow discharges; Plasma deposition

Indexed keywords

EID: 84889876809     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9783527622184.ch9     Document Type: Chapter

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