Plasma synthesis of a novel CF3-dominated fluorocarbon film

Chemistry of Materials

Volumn 8, Issue 9, 1996, Pages 2212-2214

  Wang, Jenn Hann ^a   Chen, Jin Jian ^a   Timmons, Richard B ^a  

^a UNIVERSITY OF TEXAS AT ARLINGTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000546244     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm960181x     Document Type: Article

References (19)

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