SCOPUS 정보 검색 플랫폼

Volumn 74, Issue 3, 2002, Pages 359-367

Plasma production of nanocrystalline silicon particles and polymorphous silicon thin films for large-area electronic devices

(4) Roca i Cabarrocas, Pere a Fontcuberta i Morral, Anna a Lebib, Sarra a Poissant, Yves a

a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES (France)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON;

BIOTECHNOLOGY; CHEMICAL ANALYSIS; CONFERENCE PAPER; CRYSTALLIZATION; DEVICE; FILM; MOLECULAR DYNAMICS; NANOPARTICLE; PARTICLE SIZE; PRESSURE; PRIORITY JOURNAL; STRUCTURE ANALYSIS; TEMPERATURE DEPENDENCE; TRANSPORT KINETICS;

EID: 0036292704 PISSN: 00334545 EISSN: None Source Type: Journal
DOI: 10.1351/pac200274030359 Document Type: Conference Paper

Times cited : (80)

References (25)

1
- 0000769887
- (1993) Phys. Rev. B , vol.47 , pp. 3661
- Ganguly, G.¹ Matsuda, A.²

2
- 0004123419
- Cambridge University Press, Cambridge
- (1991) Hydrogenated Amorphous Silicon
- Street, R.A.¹

3
- 0009578237
- E-MRS 2000 published in Thin Solid Films
- (2001) Proceedings of the Symposium on Thin Films for Large Area Electronics , vol.383

4
- 0348137163
- and references therein
- (2000) J. Non-Cryst. Solids , vol.266-269 , pp. 31
- Roca i Cabarrocas, P.¹

5
- 0003545739
- John Wiley, England
- (1999) Dusty Plasmas
- Bouchoule, A.¹

6
- 0001264634
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 655
- Roca i Cabarrocas, P.¹ Gay, P.² Hadjadj, A.³

7
- 0001670314
- (1998) MRS Symp. Proc. , vol.507 , pp. 855
- Roca i Cabarrocas, P.¹

8
- 0032638847
- (1999) Philos. Mag. B , vol.79 , pp. 1079
- Butté, R.¹ Meaudre, R.² Meaudre, M.³ Vignoli, S.⁴ Longeaud, C.⁵ Kleider, J.P.⁶ Roca i Cabarrocas, P.⁷

9
- 0000936528
- (1999) Appl. Pys. Lett. , vol.75 , pp. 3351
- Kleider, J.P.¹ Longeaud, C.² Gauthier, M.³ Meaudre, M.⁴ Meaudre, R.⁵ Butté, R.⁶ Vignoli, S.⁷ Roca i Cabarrocas, P.⁸

10
- 0001304143
- (1991) J. Vac. Sci. Technol. A , vol.9 , pp. 2331
- Roca i Cabarrocas, P.¹ Chévrier, J.B.² Huc, J.³ Lloret, A.⁴ Parey, J.Y.⁵ Schmitt, J.P.M.⁶

11
- 0009621025
- To be published
- Fontcuberta i Morral, A.¹ Grangeon, F.² Roca i Cabarrocas, P.³

12
- 0002398645
- (2000) J. Non-Cryst. Solids , vol.266-269 , pp. 48
- Fontcuberta i Morral, A.¹ Brenot, R.² Hamers, E.A.G.³ Vanderhaghen, R.⁴ Roca i Cabarrocas, P.⁵

13
- 0002759503
- Vienna, Austria. J. Schmid, H. A. Ossenbrink, P. Helm, H. Ehmann, E. D. Dunlop (Eds.), Report EUR 18656 EN, Joint Research Centre, European Commission
- (1998) nd World Conference on Photovoltaic Solar Energy Conversion , pp. 355
- Roca i Cabarrocas, P.¹ St'ahel, P.² Hamma, S.³ Poissant, Y.⁴

14
- 0034295431
- (2000) Plasma Phys. Control. Fusion , vol.42
- Hollenstein, Ch.¹

15
- 0002817277
- (1993) Appl. Phys. Lett. , vol.62 , pp. 1341
- Howling, A.¹ Dorier, J.-L.² Hollenstein, Ch.³

16
- 21544469810
- (1992) Appl. Phys. Lett. , vol.60 , pp. 169
- Boufendi, L.¹ Plain, A.² Blondeau, J.Ph.³ Bouchoule, A.⁴ Laure, C.⁵ Toogood, M.⁶

17
- 0000410369
- (1998) MRS Symp. Proc. , vol.507 , pp. 499
- Costa, J.¹ Roura, P.² Roca i Cabarrocas, P.³ Viera, G.⁴ Bertran, E.⁵

18
- 0027836436
- (1993) MRS Symp. Proc. , vol.297 , pp. 1031
- Costa, J.¹ Sardin, G.² Campmany, J.³ Andujar, J.L.⁴ Canillas, A.⁵ Bertran, E.⁶

19
- 0001322657
- (2000) J. Appl. Phys. , vol.88 , pp. 3674
- Hamers, E.A.G.¹ Fontcuberta i Morral, A.² Niikura, C.³ Brenot, R.⁴ Roca i Cabarrocas, P.⁵

20
- 0032064301
- (1998) J. Non-Cryst. Solids , vol.227-230 , pp. 871
- Roca i Cabarrocas, P.¹ Hamma, S.² Sharma, S.N.³ Costa, J.⁴ Bertran, E.⁵

21
- 0036540421
- To be published
- (2002) J. Non-Cryst. Solids , vol.299-302
- Fontcuberta i Morral, A.¹ Roca i Cabarrocas, P.²

22
- 0002007943
- (1999) J. Phys. Chem. B , vol.103 , pp. 64
- Swihart, M.T.¹ Girshick, S.L.²

23
- 0035247871
- (2001) Thin Solid Films , vol.383 , pp. 161
- Fontcuberta i Morral, A.¹ Roca i Cabarrocas, P.²

24
- 0032669255
- (1994) Plasma Sources Sci. Technol. , vol.8 , pp. 448
- Grangeon, F.¹ Monard, C.² Dorier, J.-L.³ Howling, A.A.⁴ Hollenstein, Ch.⁵ Romanini, D.⁶ Sadeghi, N.⁷

25
- 0001239682
- (1996) J. Appl. Phys. , vol.79 , pp. 1303
- Fridman, A.A.¹ Bufendi, L.² Hbid, T.³ Potapkin, B.V.⁴ Bouchoule, A.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.