Control of surface film composition and orientation with downstream PECVD of hexafluoropropylene oxide

Chemistry of Materials

Volumn 11, Issue 4, 1999, Pages 862-864

  Butoi, Carmen I ^a   Mackie, Neil M ^a   Barnd, Jeffrey L ^a   Fisher, Ellen R ^a   Gamble, Lara J ^a   Castner, David G ^a  

^a Department of Environmental and Radiological Health Sciences   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001182473     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm981081p     Document Type: Article

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