Nanostructure and composition control of fluorocarbon films from modulated tetrafluoroethylene plasmas

Macromolecules

Volumn 35, Issue 24, 2002, Pages 8920-8922

  Cicala, G ^a   Milella, A ^a   Palumbo, F ^a   Rossini, P ^a   Favia, P ^a   D'Agostino, R ^a  

^a UNIVERSITY OF BARI   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037137396     PISSN: 00249297     EISSN: None     Source Type: Journal    
DOI: 10.1021/ma025536e     Document Type: Letter

References (16)

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