Fourier transform infrared spectroscopy of effluents from pulsed plasmas of 1,1,2,2-tetrafluoroethane, hexafluoropropylene oxide, and difluoromethane

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 6, 1999, Pages 3419-3428

  Labelle, Catherine B ^a   Karecki, Simon M ^a   Reif, Rafael ^a   Gleason, Karen K ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000634083     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582076     Document Type: Article

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