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Chemistry of Materials

Volumn 12, Issue 10, 2000, Pages 3032-3037

Structure and morphology of fluorocarbon films grown by hot filament chemical vapor desposition

(3) Lau, K K S a Caulfield, J A b Gleason, K K a

a Massachusetts Institute of Technology Cambridge (United States)

b Engineering Research Center and Hydraulics Laboratory (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLUOROCARBON; PROPYLENE OXIDE;

ARTICLE; CHEMICAL ANALYSIS; CHEMICAL STRUCTURE; FILM; FOURIER TRANSFORMATION; INFRARED SPECTROSCOPY; MATERIALS TESTING; MORPHOLOGY; VAPOR;

EID: 0033787415 PISSN: 08974756 EISSN: None Source Type: Journal
DOI: 10.1021/cm000499w Document Type: Article

Times cited : (108)

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