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Volumn 587, Issue , 2014, Pages 313-317

Nanoindentation-induced interfacial fracture of ZnO thin films deposited on Si(1 1 1) substrates by atomic layer deposition

Author keywords

Atomic layer deposition; Interfacial fracture; Nanoindentation; ZnO thin films

Indexed keywords

BERKOVICH NANOINDENTATION; ENERGY RELEASE; INDENTATION LOAD; INTERFACIAL FRACTURE; LOAD-DISPLACEMENT CURVE; NANOINDENTATION TECHNIQUES; NANOMECHANICAL; ZNO THIN FILM;

EID: 84888120497     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2013.10.213     Document Type: Article
Times cited : (36)

References (34)
  • 33
    • 0001818087 scopus 로고
    • The anomalous behavior of silicon during nanoindentation
    • W.D. Nix, J.C. Bravman, E. Arzt, L.B. Freund, Materials Research Society Pittsburgh, PA
    • G.M. Pharr The anomalous behavior of silicon during nanoindentation W.D. Nix, J.C. Bravman, E. Arzt, L.B. Freund, Thin Films: Stresses and Mechanical Properties III, Materials Research Society Symposium Proceedings vol. 239 1992 Materials Research Society Pittsburgh, PA 301 312
    • (1992) Thin Films: Stresses and Mechanical Properties III, Materials Research Society Symposium Proceedings , vol.239 , pp. 301-312
    • Pharr, G.M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.