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Nanoscale Research Letters

Volumn 3, Issue 5, 2008, Pages 186-193

Surface morphological and nanomechanical properties of PLD-derived ZnO thin films

(7) Jian, Sheng Rui a Teng, I Ju b Yang, Ping Feng c Lai, Yi Shao c Lu, Jian Ming d Chang, Jee Gong d Ju, Shin Pon e

a I SHOU UNIVERSITY (Taiwan)

b NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

c ADVANCED SEMICONDUCTOR ENGINEERING INC (Taiwan)

d NATIONAL CENTER FOR HIGH PERFORMANCE COMPUTING (Taiwan)

e NATIONAL SUN YAT SEN UNIVERSITY (Taiwan)

Author keywords

AFM; Hardness; Nanoindentation; Nanoscratch; PLD; ZnO

Indexed keywords

CONTINUOUS STIFFNESS MEASUREMENTS (CSM); NANOSCRATCH;

ATOMIC FORCE MICROSCOPY; NANOINDENTATION; PULSED LASER DEPOSITION; SURFACE ROUGHNESS; ZINC OXIDE;

THIN FILMS;

EID: 44649186183 PISSN: 19317573 EISSN: 1556276X Source Type: Journal
DOI: 10.1007/s11671-008-9134-4 Document Type: Article

Times cited : (49)

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