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Volumn 257, Issue 17, 2011, Pages 7900-7905

Influence of annealing temperature on the structural, optical and mechanical properties of ALD-derived ZnO thin films

(12) Yen, C Y a Jian, S R a Chen, G J a Lin, C M b Lee, H Y c Ke, W C d Liao, Y Y e Yang, P F f Wang, C T f Lai, Y S f Jang, Jason S C g Juang, J Y h

a I SHOU UNIVERSITY (Taiwan)

b NATIONAL TSING HUA UNIVERSITY (Taiwan)

c NATIONAL SYNCHROTRON RADIATION RESEARCH CENTER (Taiwan)

d YUAN ZE UNIVERSITY (Taiwan)

e NATIONAL UNIVERSITY OF KAOHSIUNG (Taiwan)

f ADVANCED SEMICONDUCTOR ENGINEERING INC (Taiwan)

g NATIONAL CENTRAL UNIVERSITY (Taiwan)

h NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

Author keywords

AFM; Atomic layer deposition; Hardness; Nanoindentation; XRD; ZnO thin films

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; ATOMIC LAYER DEPOSITION; ELASTIC MODULI; HARDNESS; II-VI SEMICONDUCTORS; MECHANICAL PROPERTIES; METALLIC FILMS; MICROSTRUCTURE; NANOINDENTATION; OPTICAL FILMS; SILICON COMPOUNDS; X RAY DIFFRACTION; ZINC OXIDE;

ANNEALING TEMPERATURES; FILM SURFACES; HALL-PETCH EQUATION; OPTICAL AND MECHANICAL PROPERTIES; ORDERED MICROSTRUCTURES; PHOTOLUMINESCENCE SPECTRUM; UV EMISSIONS; ZNO THIN FILM;

THIN FILMS;

EID: 79957497908 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2011.04.088 Document Type: Article

Times cited : (58)

References (33)

1
- 0030084093
- A.P. Alivisato Science 271 1996 933
- (1996) Science , vol.271 , pp. 933
- Alivisato, A.P.¹

2
- 53949083063
- K.C. Aw, Z. Tsakadze, A. Lohani, and S. Mhaisalkar Scripta Mater. 60 2009 48
- (2009) Scripta Mater. , vol.60 , pp. 48
- Aw, K.C.¹ Tsakadze, Z.² Lohani, A.³ Mhaisalkar, S.⁴

3
- 0000521434
- T. Makino, C.H. Chia, T.T. Nguen, and Y. Segawa Appl. Phys. Lett. 77 2000 1632
- (2000) Appl. Phys. Lett. , vol.77 , pp. 1632
- Makino, T.¹ Chia, C.H.² Nguen, T.T.³ Segawa, Y.⁴

4
- 33745193944
- Y. Ryu, T.S. Lee, J.A. Lubguban, H.W. White, B.J. Kim, and Y.S. Park Appl. Phys. Lett. 88 2006 241108
- (2006) Appl. Phys. Lett. , vol.88 , pp. 241108
- Ryu, Y.¹ Lee, T.S.² Lubguban, J.A.³ White, H.W.⁴ Kim, B.J.⁵ Park, Y.S.⁶

5
- 77958540768
- Y.M. Chang, S.R. Jian, H.Y. Lee, C.M. Lin, and J.Y. Juang Nanotechnology 21 2010 385705
- (2010) Nanotechnology , vol.21 , pp. 385705
- Chang, Y.M.¹ Jian, S.R.² Lee, H.Y.³ Lin, C.M.⁴ Juang, J.Y.⁵

6
- 34547306498
- C.H. Chien, S.R. Jian, C.T. Wang, J.Y. Juang, J.C. Huang, and Y.S. Lai J. Phys. D: Appl. Phys. 40 2007 3985
- (2007) J. Phys. D: Appl. Phys. , vol.40 , pp. 3985
- Chien, C.H.¹ Jian, S.R.² Wang, C.T.³ Juang, J.Y.⁴ Huang, J.C.⁵ Lai, Y.S.⁶

7
- 39349101219
- S.R. Jian, J.Y. Juang, and Y.S. Lai J. Appl. Phys. 103 2008 033503
- (2008) J. Appl. Phys. , vol.103 , pp. 033503
- Jian, S.R.¹ Juang, J.Y.² Lai, Y.S.³

8
- 77953025712
- S.R. Jian, G.J. Chen, and T.C. Lin Nanoscale Res. Lett. 5 2010 935
- (2010) Nanoscale Res. Lett. , vol.5 , pp. 935
- Jian, S.R.¹ Chen, G.J.² Lin, T.C.³

9
- 79952423216
- S.R. Jian, J.Y. Juang, N.C. Chen, S.C. Jason, J.C. Jang, Y.S. Huang, and Lai Nanosci. Nanotechnol. Lett. 2 2010 315
- (2010) Nanosci. Nanotechnol. Lett. , vol.2 , pp. 315
- Jian, S.R.¹ Juang, J.Y.² Chen, N.C.³ Jason, S.C.⁴ Jang, J.C.⁵ Huang, Y.S.⁶ Lai⁷

10
- 40449124426
- X. Tao, X.D. Li, Nano Lett. 8 (1008) 505.
- (1008) Nano Lett. , vol.8 , pp. 505
- Tao, X.¹ Li, X.D.²

11
- 74849112128
- L. Bao, Z.H. Xu, R. Li, X.D. Li, Nano Lett. 10 (1008) 255.
- (1008) Nano Lett. , vol.10 , pp. 255
- Bao, L.¹ Xu, Z.H.² Li, R.³ Li, X.D.⁴

12
- 78149432936
- T.H. Sung, J.C. Huang, J.H. Hsu, and S.R. Jian Appl. Phys. Lett. 97 2010 171904
- (2010) Appl. Phys. Lett. , vol.97 , pp. 171904
- Sung, T.H.¹ Huang, J.C.² Hsu, J.H.³ Jian, S.R.⁴

13
- 39749093131
- P.F. Yang, H.C. Wen, S.R. Jian, Y.S. Lai, S. Wu, and R.S. Chen Microelectron. Reliab. 48 2008 389
- (2008) Microelectron. Reliab. , vol.48 , pp. 389
- Yang, P.F.¹ Wen, H.C.² Jian, S.R.³ Lai, Y.S.⁴ Wu, S.⁵ Chen, R.S.⁶

14
- 78049308461
- Q.W. Li, J.M. Bian, J.C. Sun, H.W. Liang, C.W. Zou, Y.L. Sun, and Y.M. Luo Appl. Surf. Sci. 257 2010 1634
- (2010) Appl. Surf. Sci. , vol.257 , pp. 1634
- Li, Q.W.¹ Bian, J.M.² Sun, J.C.³ Liang, H.W.⁴ Zou, C.W.⁵ Sun, Y.L.⁶ Luo, Y.M.⁷

15
- 77958107352
- X.Q. Wang, H.P. Sun, and X.Q. Pan Appl. Phys. Lett. 97 2010 151908
- (2010) Appl. Phys. Lett. , vol.97 , pp. 151908
- Wang, X.Q.¹ Sun, H.P.² Pan, X.Q.³

16
- 44649186183
- S.R. Jian, I.J. Teng, P.F. Yang, Y.S. Lai, J.M. Lu, J.G. Chang, and S.P. Ju Nanoscale Res. Lett. 3 2008 186
- (2008) Nanoscale Res. Lett. , vol.3 , pp. 186
- Jian, S.R.¹ Teng, I.J.² Yang, P.F.³ Lai, Y.S.⁴ Lu, J.M.⁵ Chang, J.G.⁶ Ju, S.P.⁷

17
- 70449509592
- C.S. Ku, J.M. Huang, C.M. Lin, and H.Y. Lee Thin Solid Films 518 2009 1373
- (2009) Thin Solid Films , vol.518 , pp. 1373
- Ku, C.S.¹ Huang, J.M.² Lin, C.M.³ Lee, H.Y.⁴

18
- 0036478720
- X.D. Li, and B. Bhushan Mater. Charact. 48 2002 11
- (2002) Mater. Charact. , vol.48 , pp. 11
- Li, X.D.¹ Bhushan, B.²

19
- 0011713787
- I.N. Sneddon Int. J. Eng. Sci. 3 1965 47
- (1965) Int. J. Eng. Sci. , vol.3 , pp. 47
- Sneddon, I.N.¹

20
- 0003427458
- Prentice Hall New Jersey
- B.D. Cullity, and S.R. Stock Element of X-ray diffraction 2001 Prentice Hall New Jersey p170
- (2001) Element of X-ray Diffraction
- Cullity, B.D.¹ Stock, S.R.²

21
- 34047265017
- E. Cetinorgu, S. Goldmith, and R.L. Boxman Surf. Coat. Technol. 201 2007 7266
- (2007) Surf. Coat. Technol. , vol.201 , pp. 7266
- Cetinorgu, E.¹ Goldmith, S.² Boxman, R.L.³

22
- 11444257247
- Z.B. Fang, Z.J. Yan, Y.S. Tan, X.Q. Liu, and Y.Y. Wang Appl. Surf. Sci. 241 2005 303
- (2005) Appl. Surf. Sci. , vol.241 , pp. 303
- Fang, Z.B.¹ Yan, Z.J.² Tan, Y.S.³ Liu, X.Q.⁴ Wang, Y.Y.⁵

23
- 0000288835
- Y. Chen, D.M. Bagnall, H.J. Koh, K.T. Park, K. Hiraga, Z.Q. Zhu, and T. Yao J. Appl. Phys. 84 1998 3912
- (1998) J. Appl. Phys. , vol.84 , pp. 3912
- Chen, Y.¹ Bagnall, D.M.² Koh, H.J.³ Park, K.T.⁴ Hiraga, K.⁵ Zhu, Z.Q.⁶ Yao, T.⁷

24
- 3843063449
- J. Lim, K. Shin, H.W. Kim, and C. Lee J. Lumin. 109 2004 181
- (2004) J. Lumin. , vol.109 , pp. 181
- Lim, J.¹ Shin, K.² Kim, H.W.³ Lee, C.⁴

25
- 2342509630
- J. Zhao, L. Hu, Z. Wang, Y. Zhao, X. Liang, and M. Wang Appl. Surf. Sci. 229 2004 311
- (2004) Appl. Surf. Sci. , vol.229 , pp. 311
- Zhao, J.¹ Hu, L.² Wang, Z.³ Zhao, Y.⁴ Liang, X.⁵ Wang, M.⁶

26
- 67349156711
- S.R. Jian, S.C. Jason, and Jang J. Alloys Compd. 482 2009 498
- (2009) J. Alloys Compd. , vol.482 , pp. 498
- Jian, S.R.¹ Jason, S.C.² Jang³

27
- 77951023664
- S.R. Jian, G.J. Chen, and J.Y. Juang Curr. Opin. Solid State Mater. Sci. 14 2010 69
- (2010) Curr. Opin. Solid State Mater. Sci. , vol.14 , pp. 69
- Jian, S.R.¹ Chen, G.J.² Juang, J.Y.³

28
- 0011059425
- M.S. Bobji, S.K. Biswas, and J.B. Pethica Appl. Phys. Lett. 71 1997 1059
- (1997) Appl. Phys. Lett. , vol.71 , pp. 1059
- Bobji, M.S.¹ Biswas, S.K.² Pethica, J.B.³

29
- 0345119079
- X.D. Li, H. Gao, C.J. Murphy, and K.K. Caswell Nano Lett. 11 2003 1495
- (2003) Nano Lett. , vol.11 , pp. 1495
- Li, X.D.¹ Gao, H.² Murphy, C.J.³ Caswell, K.K.⁴

30
- 11044233461
- P. Delobelle, O. Guillon, E. Fribourg-Blanc, C. Soyer, E. Cattan, and D. Rminens Appl. Phys. Lett. 85 2004 5185
- (2004) Appl. Phys. Lett. , vol.85 , pp. 5185
- Delobelle, P.¹ Guillon, O.² Fribourg-Blanc, E.³ Soyer, C.⁴ Cattan, E.⁵ Rminens, D.⁶

31
- 0037461209
- S. Zhang, D. Sun, Y.Q. Fu, and H.J. Du Surf. Coat. Technol. 167 2003 113
- (2003) Surf. Coat. Technol. , vol.167 , pp. 113
- Zhang, S.¹ Sun, D.² Fu, Y.Q.³ Du, H.J.⁴

32
- 0033715648
- H. Conrad, and J. Narayan Scripta Mater. 42 2000 1025
- (2000) Scripta Mater. , vol.42 , pp. 1025
- Conrad, H.¹ Narayan, J.²

33
- 20844455287
- V.A. Coleman, J.E. Bradby, C. Jagadish, P. Munroe, Y.W. Heo, S.J. Pearton, D.P. Norton, M. Inoue, and M. Yano Appl. Phys. Lett. 86 2005 203105
- (2005) Appl. Phys. Lett. , vol.86 , pp. 203105
- Coleman, V.A.¹ Bradby, J.E.² Jagadish, C.³ Munroe, P.⁴ Heo, Y.W.⁵ Pearton, S.J.⁶ Norton, D.P.⁷ Inoue, M.⁸ Yano, M.⁹

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